Square Shaped MEMS Capacitive Pressure Sensors for Biological Applications
The focus of this study is on mathematical modelling analysis and simulation of a micromechanical system based on a capacitive pressure sensor with a square diaphragm of 500 μm × 500 μm. The mechanical operation of the suggested device under the impact of a uniform pressure range employing different...
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| Published in | ECS transactions Vol. 107; no. 1; pp. 6089 - 6100 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
The Electrochemical Society, Inc
24.04.2022
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| Online Access | Get full text |
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