Pressure fluctuations in systems evacuated by diffusion pumps
The problem of pressure fluctuations occuring in systems pumped by diffusion pumps has been reported by several investigators, various conclusions have been reached. Such fluctuations can exhibit different characteristic symptoms; in work carried out by the authors, two distinct types of fine side f...
Saved in:
Published in | Vacuum Vol. 16; no. 11; pp. 619 - 621 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Elsevier Ltd
1966
|
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!