Pressure fluctuations in systems evacuated by diffusion pumps

The problem of pressure fluctuations occuring in systems pumped by diffusion pumps has been reported by several investigators, various conclusions have been reached. Such fluctuations can exhibit different characteristic symptoms; in work carried out by the authors, two distinct types of fine side f...

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Bibliographic Details
Published inVacuum Vol. 16; no. 11; pp. 619 - 621
Main Authors Bance, UR, Harden, EH
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 1966
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