High-speed Nanometric-precision Profilometry using Vertical Scanning Interferometry and Two high-power LED - ADACHI, Masaaki; ENOMOTO, Fumihiko; UEDA, Kakuji (Journal of the Japan Society for Precision Engineering, Contributed Papers, 2005)
Keywords: LED; nanometer; phase shift; profilometry; two wavelengths; vertical scanning; white light interferometry