Excimer Laser Annealing Effects of Silicon-rich Silicon Nitride Films Prepared by Using Catalytic Chemical Vapor Deposition

• Published in: ECS transactions Vol. 25; no. 10; pp. 111 - 116
• Main Authors: Lee, Kyoung-Min, Hwang, Jae-Dam, Lee, Youn-Jin, Kim, Sun-Jae, Han, Min-Koo, Jang, Seunghun, Han, Moonsup, Won, Sunghwan, Sok, Junghyun, Park, Kyoungwan, Hong, Wan-Shick
• Format: Journal Article
• Language: English
• Published: 25.09.2009

We studied excimer laser annealing effects on silicon-rich silicon nitride films containing silicon quantum dots to develop silicon based flexible Light emitting diodes. The silicon-rich silicon nitride films were deposited by catalytic chemical vapor deposition system using a mixture of SiH4, NH3 a...