Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs
This paper describes the potential of a membrane carrier upgrade for legacy CMP tools, such as an IPEC 472. Seventeen different polish parameter settings were applied for both, 150 mm and 200 mm wafers in order to cover a wide range of applications. Resulting from these experiments, a significant pe...
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Published in | ECS transactions Vol. 72; no. 18; pp. 17 - 24 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
The Electrochemical Society, Inc
28.07.2016
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Online Access | Get full text |
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Abstract | This paper describes the potential of a membrane carrier upgrade for legacy CMP tools, such as an IPEC 472. Seventeen different polish parameter settings were applied for both, 150 mm and 200 mm wafers in order to cover a wide range of applications. Resulting from these experiments, a significant performance gain in comparison to stiff carriers becomes evident. |
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AbstractList | This paper describes the potential of a membrane carrier upgrade for legacy CMP tools, such as an IPEC 472. Seventeen different polish parameter settings were applied for both, 150 mm and 200 mm wafers in order to cover a wide range of applications. Resulting from these experiments, a significant performance gain in comparison to stiff carriers becomes evident. |
Author | Wachsmuth, Holger Schubert, Ina Trojan, Dan Junghans, Romy Rudolph, Catharina VanDevender, Barrie Wrschka, Peter Franz, Mathias Martinka, Ronny Gottfried, Knut Christoph |
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Title | Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs |
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