Behaviors of capacitive and Pirani vacuum gauges Case study on time effect

• Published in: Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten Vol. 30; no. 5; pp. 39 - 44
• Main Authors: Zavarian, Ali Asghar, Arman, Ali, Ghotbi, S. M. Jamal, Korpi, Alireza Grayeli, Salehi, Maryam, Mardani, Mohsen, Hafezi, Fatemeh, Shafiekhani, Azizollah, Ţălu, Ştefan, Afghan, Ashkan Sepehr
• Format: Journal Article
• Language: German
• Published: 01.10.2018

Knowing the exact pressure of the process has a great impact on the validity of the results, product quality, energy efficiency, and in some processes, on the security of work with the system. Hence, the calibration of the barometers and the accuracy of the readings should be taken seriously. Choosi...