Consideration of Secondary Electron Emission Effect for Probe Measurement

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 51; no. 9R; p. 96101
Main Authors Tawaraya, Takehito, Tsushima, Akira, Yoshimura, Shinji
Format Journal Article
LanguageEnglish
Japanese
Published 01.09.2012
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.51.096101