Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes

• Published in: Journal of microelectromechanical systems Vol. 33; no. 5; pp. 514 - 523
• Main Authors: Vujadinovic, Milos, Hiller, Tobias, Balslink, Thorsten, Elsobky, Mourad, Blocher, Lukas, Buhmann, Alexander, Northemann, Thomas, Choubey, Bhaskar
• Format: Journal Article
• Language: English
• Published: IEEE 01.10.2024
• Subjects: 1/f noise; Allan deviation; analytical model; bias instability; Demodulation; flicker noise; gyroscope; Gyroscopes; MEMS inertial sensor; Micromechanical devices; mode-split; Noise; Phase locked loops; phase noise; phase space; Resonant frequency; scale factor instability; sensitivity

This paper presents a general instability model of mode-split MEMS gyroscopes. The proposed model can accurately predict the bias instability of a given device based on the applied angular rate and system parameters. The model consists of two noise models: bias instability and scale factor instabili...