Analysis of Pre- and Post-Conditioned Polyurethane CMP Pad Surfaces as a Function of Conditioning Temperature

• Published in: ECS transactions Vol. 3; no. 41; pp. 31 - 44
• Main Authors: Prasad, Abaneshwar, Xiang, Hongqi, Wang, Jianhua, Remsen, Edward E.
• Format: Journal Article
• Language: English
• Published: 10.12.2007

The investigation of water diffusion in polyurethane CMP pads via hydrogen-deuterium (H-D) exchange, measured by attenuated total reflectance/FT-IR (ATR/FT-IR), is reported. Significant differences in the kinetics of H-D exchange for a thermoplastic polyurethane (TPU) pad and a conventional cross- l...