Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow‐Power Metal Oxide Semiconductor‐Based Gas Sensors (Small 48/2022)

Suspended 1D Nanoheaters In article number 2204078, Heungjoo Shin and co‐workers report a suspended 1D nanoheater capable of ultrarapid heating at an ultralow power. The nanoheater is implemented as a gas sensor by the regioselective growth of metal oxide nanomaterials, enabling reliable and sensiti...

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Published inSmall (Weinheim an der Bergstrasse, Germany) Vol. 18; no. 48
Main Authors Kim, Taejung, Cho, Wootaek, Kim, Beomsang, Yeom, Junyeong, Kwon, Yeong Min, Baik, Jeong Min, Kim, Jae Joon, Shin, Heungjoo
Format Journal Article
LanguageEnglish
Published 01.12.2022
Subjects
gas sensors
metal oxide semiconductors
nanoheaters
suspended 1D architectures
ultralow power
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Summary:Suspended 1D Nanoheaters In article number 2204078, Heungjoo Shin and co‐workers report a suspended 1D nanoheater capable of ultrarapid heating at an ultralow power. The nanoheater is implemented as a gas sensor by the regioselective growth of metal oxide nanomaterials, enabling reliable and sensitive gas detection. This sophisticated nanodevice can be manufactured using batch microfabrication technology exclusively, offering promising pathways for applications in various electrothermal devices.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.202270258