Temperature dependences of optical properties, chemical composition, structure, and laser damage in Ta2O5 films

• Published in: 中国物理B：英文版 Vol. 21; no. 11; pp. 297 - 305
• Main Author: 许程 杨帅 张生辉 牛继南 强颖怀 刘炯天 李大伟
• Format: Journal Article
• Language: English
• Published: 01.11.2012
• Subjects: Ta2O5; X射线衍射分析; 光学性能; 化学成分; 氮化钽薄膜; 沉积温度; 激光损伤阈值; 结构

Ta2O5 films are prepared by e-beam evaporation with varied deposition temperatures, annealing temperatures, and annealing times. The effects of temperature on the optical properties, chemical composition, structure, and laser- induced damage threshold （LIDT） are systematically investigated. The resu...