The Temperature Optimization in RF Heating for a MOCVD Susceptor By Using Numerical Methods

• Published in: ECS transactions Vol. 60; no. 1; pp. 1007 - 1013
• Main Authors: Lu, Jin Fu, Hu, Chih Kai, Li, Tomi T.
• Format: Journal Article
• Language: English
• Published: 27.02.2014

This analysis of numerical simulation indicates that the temperature distribution is greatly affected by the different distance between the coil and bottom susceptor as well as the coil spaces in a RF MOCVD reactor. This paper concludes that the uniformity in temperature difference with only 2.6 K o...