P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement - Wen, Huiming; Xiang, Lei; Wang, Guangjun; Xiong, Yong; Gao, Caiyong; Liu, Bo; Huang, Jian; Tan, Luolin (SID International Symposium Digest of technical papers, 2024)
Keywords: ESC for dry etching; Screens; Withstand drop strength; Zero-cost