Tailored Voltage Waveform Deposition of Microcrystalline Silicon Thin Films from Hydrogen-Diluted Silane and Silicon Tetrafluoride: Optoelectronic Properties of Films

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Published inJapanese Journal of Applied Physics Vol. 51; no. 8S1; p. 8
Main Authors Johnson, Erik V., Pouliquen, Sylvain, Delattre, Pierre-Alexandre, Booth, Jean-Paul
Format Journal Article
LanguageEnglish
Published 01.08.2012
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Author Delattre, Pierre-Alexandre
Pouliquen, Sylvain
Booth, Jean-Paul
Johnson, Erik V.
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10.1002/pssc.200982798
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Title Tailored Voltage Waveform Deposition of Microcrystalline Silicon Thin Films from Hydrogen-Diluted Silane and Silicon Tetrafluoride: Optoelectronic Properties of Films
Volume 51
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