P‐109: Investigation of Low Residual Stress Anti Reflection Coating with High Hardness for Display Applications

Anti reflection coating with high hardness on the OLED display surface was studied to improve the wear resistance and visibility of OLED. However, the high residual stress inside the multilayer thin film configuration of anti reflection coating has been a problem and the improvement is necessary. In...

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Bibliographic Details
Published inSID International Symposium Digest of technical papers Vol. 55; no. 1; pp. 1797 - 1800
Main Authors Kim, Sungwoo, Joo, Jongseok
Format Journal Article
LanguageEnglish
Published Campbell Wiley Subscription Services, Inc 01.06.2024
Subjects
Anti Reflection
Antireflection coatings
Hardness
High Hardness
Multilayer films
Multilayers
Nanocomposites
Optical properties
Residual Stress
RF Magnetron Sputtering
SiO2-Si3N4 film
Thin films
Wear resistance
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ISSN0097-966X
2168-0159
DOI10.1002/sdtp.17926

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Summary:Anti reflection coating with high hardness on the OLED display surface was studied to improve the wear resistance and visibility of OLED. However, the high residual stress inside the multilayer thin film configuration of anti reflection coating has been a problem and the improvement is necessary. In this study, the residual stress and optical properties variation on various deposition conditions on the thin film were investigated. In addition, we suggested new coating structure using nanocomposites to overcome the residual stress of films.
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ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17926