Investigation of extended-gate field-effect transistor pH sensors based on different-temperature-annealed bi-layer MWCNTs-In2O3 films

• Published in: Nanoscale research letters Vol. 9; no. 1; p. 502
• Main Authors: Hung, Shang-Chao, Cheng, Nai-Jen, Yang, Cheng-Fu, Lo, Yuan-Pin
• Format: Journal Article
• Language: English
• Published: New York Springer New York 16.09.2014; Springer Nature B.V; BioMed Central Ltd; Springer
• Subjects: Chemistry and Materials Science; Materials Science; Molecular Medicine; Nano Express; Nanochemistry; Nanoscale Science and Technology; Nanotechnology; Nanotechnology and Microengineering; Multiwalled carbon nanotubes; films; MWCNTs-In; pH sensor; Bi-layer; O; MWCNTs-In2O3 films

In this paper, indium (In) films were deposited on glass substrates using DC sputtering method. Multiwalled carbon nanotubes (MWCNTs) and dispersant were dissolved in alcohol, and the mixed solution was deposited on the In films using the spray method. The bi-layer MWCNTs-In 2 O 3 films were anneale...