High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2

• Published in: arXiv.org
• Main Authors: Butcher, Amy, Guo, Xinghan, Shreiner, Robert, Nazar Delegan, Hao, Kai, Duda, Peter J, Awschalom, David D, Heremans, F Joseph, High, Alexander A
• Format: Paper Journal Article
• Language: English
• Published: Ithaca Cornell University Library, arXiv.org 30.05.2020
• Subjects: Atomic layer epitaxy; Color centers; Diamonds; Emitters; Etching; Membranes; Optical communication; Optical resonance; Optical resonators; Photonics; Photons; Physics - Optics; Physics - Quantum Physics; Titanium dioxide

Integrating solid-state quantum emitters with nanophotonic resonators is essential for efficient spin-photon interfacing and optical networking applications. While diamond color centers have proven to be excellent candidates for emerging quantum technologies, their integration with optical resonator...