200 mm Sensor Development Using Bonded Wafers

• Published in: arXiv.org
• Main Authors: Alyari, M, Bradford, R, Campanella, M, Camporeale, P, Demina, R, Everts, J, Gecse, Z, Halenza, R, Heintz, U, Holland, S, Hong, S, Korjenevski, S, Lampis, A, Lipton, R, Patti, R, Segal, J, Shin, K W
• Format: Paper Journal Article
• Language: English
• Published: Ithaca Cornell University Library, arXiv.org 02.09.2020
• Subjects: Float zones; Large Hadron Collider; Luminosity; Physics - High Energy Physics - Experiment; Physics - Instrumentation and Detectors; Sensors; Silicon; Solenoids; Wafers

Sensors fabricated from high resistivity, float zone, silicon material have been the basis of vertex detectors and trackers for the last 30 years. The areas of these devices have increased from a few square cm to \(\> 200\ m^2\) for the existing CMS tracker. High Luminosity Large Hadron Collider...