Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half-pitch in hydrogen silsesquioxane resist. We also analyzed the resolution limits of this technique by measuring the point-spread funct...
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| Published in | Nano letters Vol. 13; no. 4; pp. 1555 - 1558 |
|---|---|
| Main Authors | , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Washington, DC
American Chemical Society
10.04.2013
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| Subjects | |
| Online Access | Get full text |
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| Abstract | We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half-pitch in hydrogen silsesquioxane resist. We also analyzed the resolution limits of this technique by measuring the point-spread function at 200 keV. Furthermore, we measured the energy loss in the resist using electron-energy-loss spectroscopy. |
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| AbstractList | We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half-pitch in hydrogen silsesquioxane resist. We also analyzed the resolution limits of this technique by measuring the point-spread function at 200 keV. Furthermore, we measured the energy loss in the resist using electron-energy-loss spectroscopy.We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half-pitch in hydrogen silsesquioxane resist. We also analyzed the resolution limits of this technique by measuring the point-spread function at 200 keV. Furthermore, we measured the energy loss in the resist using electron-energy-loss spectroscopy. We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5 nm half-pitch in hydrogen silsesquioxane resist. We also analyzed the resolution limits of this technique by measuring the point-spread function at 200 keV. Furthermore, we measured the energy loss in the resist using electron-energy-loss spectroscopy. |
| Author | Duan, Huigao Stach, Eric A Berggren, Karl K Manfrinato, Vitor R Zhang, Lihua Su, Dong Hobbs, Richard G |
| AuthorAffiliation | Massachusetts Institute of Technology Hunan University Brookhaven National Laboratory |
| AuthorAffiliation_xml | – name: Brookhaven National Laboratory – name: Hunan University – name: Massachusetts Institute of Technology |
| Author_xml | – sequence: 1 givenname: Vitor R surname: Manfrinato fullname: Manfrinato, Vitor R – sequence: 2 givenname: Lihua surname: Zhang fullname: Zhang, Lihua – sequence: 3 givenname: Dong surname: Su fullname: Su, Dong – sequence: 4 givenname: Huigao surname: Duan fullname: Duan, Huigao – sequence: 5 givenname: Richard G surname: Hobbs fullname: Hobbs, Richard G – sequence: 6 givenname: Eric A surname: Stach fullname: Stach, Eric A – sequence: 7 givenname: Karl K surname: Berggren fullname: Berggren, Karl K email: berggren@mit.edu |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27275290$$DView record in Pascal Francis https://www.ncbi.nlm.nih.gov/pubmed/23488936$$D View this record in MEDLINE/PubMed https://www.osti.gov/biblio/1087066$$D View this record in Osti.gov |
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| Cites_doi | 10.1116/1.3253652 10.1016/S0167-9317(98)00076-8 10.1063/1.89155 10.1021/nl3001309 10.1116/1.583847 10.1038/nnano.2010.176 10.1116/1.3501359 10.1116/1.3167367 10.1116/1.3253603 10.1016/S0169-4332(00)00352-4 10.1063/1.329366 10.1116/1.2798711 10.1116/1.1342011 10.1116/1.570288 10.1116/1.582642 10.1038/nmat964 10.1116/1.568524 10.1116/1.1763897 10.1116/1.590762 10.1116/1.2801881 10.1116/1.1421548 10.1038/nature08639 10.1109/T-ED.1965.15607 10.1103/PhysRevB.15.4699 10.1063/1.115958 10.1021/nl102259s 10.1021/nl050522i 10.1116/1.571180 10.1103/PhysRevB.78.233403 10.1038/35046000 10.1116/1.3517607 |
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| Copyright | Copyright © 2013 American Chemical
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| Keywords | STEM lithography electron beam lithography high voltage electron beam lithography hydrogen silsesquioxane EELS point spread function EEL spectroscopy Electron resists Silsesquioxane polymer Electron beam lithography Aberrations Resists Energy losses Scanning transmission electron microscopy |
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| References | Rishton S. (ref11/cit11) 1987; 5 Broers A. (ref2/cit2) 1976; 29 Pease R. F. (ref7/cit7) 2010; 28 Arjmandi N. (ref8/cit8) 2009; 27 Namatsu H. (ref15/cit15) 1998; 42 Chung M. (ref32/cit32) 1977; 15 Isaacson M. (ref3/cit3) 1981; 19 Joy D. (ref30/cit30) 1995; 4 Werner W. (ref33/cit33) 2011; 99 Wu B. (ref29/cit29) 2001; 19 Howard R. (ref9/cit9) 1983; 1 Song H. (ref26/cit26) 2009; 462 Joachim C. (ref25/cit25) 2000; 408 Duan H. (ref28/cit28) 2010; 10 Cord B. (ref5/cit5) 2009; 27 Kyser D. (ref12/cit12) 1975; 12 Luo S. (ref31/cit31) 1990 Wells O. (ref1/cit1) 1965; 12 Yang J. (ref19/cit19) 2007; 25 Murata K. (ref13/cit13) 1981; 52 Hu W. (ref17/cit17) 2004; 22 Werner W. (ref34/cit34) 2008; 78 Vieu C. (ref20/cit20) 2000; 164 Ward D. (ref23/cit23) 2010; 5 van Dorp W. (ref22/cit22) 2005; 5 Fujita J. (ref16/cit16) 1996; 68 Duan H. (ref24/cit24) 2012; 12 Yang J. (ref4/cit4) 2009; 27 Yang X. (ref18/cit18) 2007; 25 Yasin S. (ref21/cit21) 2001; 19 Sarikaya M. (ref27/cit27) 2003; 2 Duan H. (ref6/cit6) 2010; 28 Kyser D. (ref10/cit10) 1979; 16 Olkhovets A. (ref14/cit14) 1999; 17 |
| References_xml | – volume: 27 start-page: 2622 issue: 6 year: 2009 ident: ref4/cit4 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.3253652 – volume: 42 start-page: 331 year: 1998 ident: ref15/cit15 publication-title: Microelectron. Eng. doi: 10.1016/S0167-9317(98)00076-8 – volume: 29 start-page: 596 issue: 9 year: 1976 ident: ref2/cit2 publication-title: Appl. Phys. Lett. doi: 10.1063/1.89155 – volume: 12 start-page: 1683 issue: 3 year: 2012 ident: ref24/cit24 publication-title: Nano Lett. doi: 10.1021/nl3001309 – volume: 5 start-page: 135 issue: 1 year: 1987 ident: ref11/cit11 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.583847 – volume: 5 start-page: 732 issue: 10 year: 2010 ident: ref23/cit23 publication-title: Nat. Nanotechnol. doi: 10.1038/nnano.2010.176 – volume: 28 start-page: C6H11 issue: 6 year: 2010 ident: ref6/cit6 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.3501359 – volume: 27 start-page: 1915 issue: 4 year: 2009 ident: ref8/cit8 publication-title: J. Vac. Sci. Technol. B doi: 10.1116/1.3167367 – volume: 4 start-page: 125 issue: 3 year: 1995 ident: ref30/cit30 publication-title: Microbeam Anal. – volume: 27 start-page: 2616 issue: 6 year: 2009 ident: ref5/cit5 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.3253603 – volume: 164 start-page: 111 year: 2000 ident: ref20/cit20 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(00)00352-4 – volume: 99 start-page: 18 year: 2011 ident: ref33/cit33 publication-title: Appl. Phys. Lett. – volume: 52 start-page: 4396 issue: 7 year: 1981 ident: ref13/cit13 publication-title: J. Appl. Phys. doi: 10.1063/1.329366 – volume: 25 start-page: 2202 issue: 6 year: 2007 ident: ref18/cit18 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.2798711 – volume: 19 start-page: 311 issue: 1 year: 2001 ident: ref21/cit21 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.1342011 – volume: 16 start-page: 1759 issue: 6 year: 1979 ident: ref10/cit10 publication-title: J. Vac. Sci. Technol. doi: 10.1116/1.570288 – volume: 1 start-page: 1101 issue: 4 year: 1983 ident: ref9/cit9 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.582642 – volume: 2 start-page: 577 issue: 9 year: 2003 ident: ref27/cit27 publication-title: Nat. Mater. doi: 10.1038/nmat964 – start-page: 127 year: 1990 ident: ref31/cit31 publication-title: Scanning Microsc. – volume: 12 start-page: 1305 issue: 6 year: 1975 ident: ref12/cit12 publication-title: J. Vac. Sci. Technol. doi: 10.1116/1.568524 – volume: 22 start-page: 1711 issue: 4 year: 2004 ident: ref17/cit17 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.1763897 – volume: 17 start-page: 1366 issue: 4 year: 1999 ident: ref14/cit14 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.590762 – volume: 25 start-page: 2025 issue: 6 year: 2007 ident: ref19/cit19 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.2801881 – volume: 19 start-page: 2508 issue: 6 year: 2001 ident: ref29/cit29 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.1421548 – volume: 462 start-page: 1039 issue: 7276 year: 2009 ident: ref26/cit26 publication-title: Nature doi: 10.1038/nature08639 – volume: 12 start-page: 556 issue: 10 year: 1965 ident: ref1/cit1 publication-title: IEEE Trans. Electron Devices doi: 10.1109/T-ED.1965.15607 – volume: 15 start-page: 4699 issue: 10 year: 1977 ident: ref32/cit32 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.15.4699 – volume: 68 start-page: 1297 issue: 9 year: 1996 ident: ref16/cit16 publication-title: Appl. Phys. Lett. doi: 10.1063/1.115958 – volume: 10 start-page: 3710 issue: 9 year: 2010 ident: ref28/cit28 publication-title: Nano Lett. doi: 10.1021/nl102259s – volume: 5 start-page: 1303 issue: 7 year: 2005 ident: ref22/cit22 publication-title: Nano Lett. doi: 10.1021/nl050522i – volume: 19 start-page: 1117 issue: 4 year: 1981 ident: ref3/cit3 publication-title: J. Vac. Sci. Technol. doi: 10.1116/1.571180 – volume: 78 start-page: 23 year: 2008 ident: ref34/cit34 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.78.233403 – volume: 408 start-page: 541 issue: 6812 year: 2000 ident: ref25/cit25 publication-title: Nature doi: 10.1038/35046000 – volume: 28 start-page: C6A1 issue: 6 year: 2010 ident: ref7/cit7 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.3517607 |
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| Snippet | We investigated electron-beam lithography with an aberration-corrected scanning transmission electron microscope. We achieved 2 nm isolated feature size and 5... |
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| SubjectTerms | Aberration Cross-disciplinary physics: materials science; rheology Electron beam lithography Electronics Electrons Energy measurement Energy use Exact sciences and technology functional nanomaterials high voltage electron beam lithography Hydrogen - chemistry Materials science Methods of nanofabrication Microscopy, Electron, Scanning Transmission Nanolithography NANOSCIENCE AND NANOTECHNOLOGY Nanostructure Organosilicon Compounds - chemistry Physics Resists Scanning electron microscopy Spectroscopy Spectroscopy, Electron Energy-Loss STEM lithography |
| Title | Resolution Limits of Electron-Beam Lithography toward the Atomic Scale |
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