Fabrication of Poly(methyl methacrylate) Microfluidic Chips by Atmospheric Molding

• Published in: Analytical chemistry (Washington) Vol. 76; no. 8; pp. 2290 - 2297
• Main Authors: Muck, Alexander, Wang, Joseph, Jacobs, Michael, Chen, Gang, Chatrathi, Madhu Prakash, Jurka, Vlastimil, Výborný, Zdeněk, Spillman, Scott D, Sridharan, Gautham, Schöning, Michael J
• Format: Journal Article
• Language: English
• Published: Washington, DC American Chemical Society 15.04.2004
• Subjects: Analytical chemistry; Chemistry; Electrochemical methods; Exact sciences and technology; General, instrumentation; Injection molding; Polymerization; Semiconductors; Performance evaluation; Molding; Atmospheric pressure; Methyl methacrylate polymer; Polymerization; Conductometry; Reproducibility; Amperometry; Silicon; Manufacturing; Microstructure; Microfluidics; Non contact measurement
• DOI: 10.1021/ac035030+
• ISSN: 0003-2700

A greatly simplified method for fabricating poly(methyl methacrylate) (PMMA) separation microchips is introduced. The new protocol relies on UV-initiated polymerization of the monomer solution in an open mold under ambient pressure. Silicon microstructures are transferred to the polymer substrate by molding a methyl methacrylate solution in a sandwich (silicon master/Teflon spacer/glass plate) mold. The chips are subsequently assembled by thermal sealing of the channel and cover plates. The new fabrication method obviates the need for specialized replication equipment and reduces the complexity of prototyping and manufacturing. Variables of the fabrication process were assessed and optimized. The new method compares favorably with common fabrication techniques, yielding high-quality devices with well-defined channel and injection-cross structures, and highly smoothed surfaces. Nearly 100 PMMA chips were replicated using a single silicon master, with high chip-to-chip reproducibility (relative standard deviations of 1.5 and 4.7% for the widths and depths of the replicated channels, respectively). The relatively high EOF value of the new chips (2.12 × 10-4 cm2·V-1·s-1) indicates that the UV polymerization process increases the surface charge and hence enhances the fluidic transport. The attractive performance of the new CE microchips has been demonstrated in connection with end-column amperometric and contactless-conductivity detection schemes. While the new approach is demonstrated in connection with PMMA microchips, it could be applied to other materials that undergo light-initiated polymerization. The new approach brings significant simplification of the process of fabricating PMMA devices and should lead to a widespread low-cost production of high-quality separation microchips.