Nanomechanical Resonators: Toward Atomic Scale

The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturizat...

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Bibliographic Details
Published inACS nano Vol. 16; no. 10; pp. 15545 - 15585
Main Authors Xu, Bo, Zhang, Pengcheng, Zhu, Jiankai, Liu, Zuheng, Eichler, Alexander, Zheng, Xu-Qian, Lee, Jaesung, Dash, Aneesh, More, Swapnil, Wu, Song, Wang, Yanan, Jia, Hao, Naik, Akshay, Bachtold, Adrian, Yang, Rui, Feng, Philip X.-L., Wang, Zenghui
Format Journal Article
LanguageEnglish
Published American Chemical Society 25.10.2022
Subjects
Review
one-dimensional materials
sensing
radio frequency
quantum engineering
signal processing
dynamic range
two-dimensional materials
nanoelectromechanical systems
resonators
frequency tuning
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Abstract The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturizationgenuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
AbstractList The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturizationgenuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization─genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important discoveries, and inspired researchers to venture to previously unexplored grounds. Scientific feats and technological milestones of miniaturization of mechanical structures have been widely accomplished by advances in machining and sculpturing ever shrinking features out of bulk materials such as silicon. With the flourishing multidisciplinary field of low-dimensional nanomaterials, including one-dimensional (1D) nanowires/nanotubes and two-dimensional (2D) atomic layers such as graphene/phosphorene, growing interests and sustained effort have been devoted to creating mechanical devices toward the ultimate limit of miniaturization—genuinely down to the molecular or even atomic scale. These ultrasmall movable structures, particularly nanomechanical resonators that exploit the vibratory motion in these 1D and 2D nano-to-atomic-scale structures, offer exceptional device-level attributes, such as ultralow mass, ultrawide frequency tuning range, broad dynamic range, and ultralow power consumption, thus holding strong promises for both fundamental studies and engineering applications. In this Review, we offer a comprehensive overview and summary of this vibrant field, present the state-of-the-art devices and evaluate their specifications and performance, outline important achievements, and postulate future directions for studying these miniscule yet intriguing molecular-scale machines.
Author Liu, Zuheng
Naik, Akshay
Feng, Philip X.-L.
Jia, Hao
Bachtold, Adrian
Eichler, Alexander
Zhang, Pengcheng
Dash, Aneesh
Xu, Bo
Wang, Yanan
Zhu, Jiankai
Yang, Rui
Wang, Zenghui
Wu, Song
Lee, Jaesung
Zheng, Xu-Qian
More, Swapnil
AuthorAffiliation Institute of Fundamental and Frontier Sciences
University of Electronic Science and Technology of China
School of Electronic Information and Electrical Engineering
Shanghai Jiao Tong University
Department of Physics
Centre for Nano Science and Engineering
The Barcelona Institute of Science and Technology
ICFO-Institut de Ciencies Fotoniques
Department of Electrical and Computer Engineering, Herbert Wertheim College of Engineering
Department of Electrical and Computer Engineering
College of Integrated Circuit Science and Engineering
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China
University of Michigan−Shanghai Jiao Tong University Joint Institute
Nanjing University of Posts and Telecommunications
AuthorAffiliation_xml – name: The Barcelona Institute of Science and Technology
– name: University of Electronic Science and Technology of China
– name: University of Michigan−Shanghai Jiao Tong University Joint Institute
– name: Shanghai Jiao Tong University
– name: Institute of Fundamental and Frontier Sciences
– name: School of Electronic Information and Electrical Engineering
– name: ICFO-Institut de Ciencies Fotoniques
– name: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China
– name: Department of Physics
– name: Department of Electrical and Computer Engineering, Herbert Wertheim College of Engineering
– name: Centre for Nano Science and Engineering
– name: College of Integrated Circuit Science and Engineering
– name: Nanjing University of Posts and Telecommunications
– name: Department of Electrical and Computer Engineering
Author_xml – sequence: 1
  givenname: Bo
  orcidid: 0000-0003-0262-2017
  surname: Xu
  fullname: Xu, Bo
  organization: University of Electronic Science and Technology of China
– sequence: 2
  givenname: Pengcheng
  orcidid: 0000-0003-4106-6762
  surname: Zhang
  fullname: Zhang, Pengcheng
  organization: University of Michigan−Shanghai Jiao Tong University Joint Institute
– sequence: 3
  givenname: Jiankai
  orcidid: 0000-0002-5495-7612
  surname: Zhu
  fullname: Zhu, Jiankai
  organization: University of Electronic Science and Technology of China
– sequence: 4
  givenname: Zuheng
  orcidid: 0000-0002-1866-2649
  surname: Liu
  fullname: Liu, Zuheng
  organization: University of Michigan−Shanghai Jiao Tong University Joint Institute
– sequence: 5
  givenname: Alexander
  orcidid: 0000-0001-6757-3442
  surname: Eichler
  fullname: Eichler, Alexander
  organization: Department of Physics
– sequence: 6
  givenname: Xu-Qian
  orcidid: 0000-0003-4705-771X
  surname: Zheng
  fullname: Zheng, Xu-Qian
  organization: Nanjing University of Posts and Telecommunications
– sequence: 7
  givenname: Jaesung
  orcidid: 0000-0003-0492-2478
  surname: Lee
  fullname: Lee, Jaesung
  organization: Department of Electrical and Computer Engineering
– sequence: 8
  givenname: Aneesh
  orcidid: 0000-0002-6465-6506
  surname: Dash
  fullname: Dash, Aneesh
  organization: Centre for Nano Science and Engineering
– sequence: 9
  givenname: Swapnil
  orcidid: 0000-0001-7906-8902
  surname: More
  fullname: More, Swapnil
  organization: Centre for Nano Science and Engineering
– sequence: 10
  givenname: Song
  orcidid: 0000-0002-3104-1855
  surname: Wu
  fullname: Wu, Song
  organization: University of Electronic Science and Technology of China
– sequence: 11
  givenname: Yanan
  orcidid: 0000-0002-9663-4491
  surname: Wang
  fullname: Wang, Yanan
  organization: Department of Electrical and Computer Engineering
– sequence: 12
  givenname: Hao
  orcidid: 0000-0002-1429-6995
  surname: Jia
  fullname: Jia, Hao
– sequence: 13
  givenname: Akshay
  orcidid: 0000-0001-6325-7231
  surname: Naik
  fullname: Naik, Akshay
  email: anaik@iisc.ac.in
  organization: Centre for Nano Science and Engineering
– sequence: 14
  givenname: Adrian
  orcidid: 0000-0002-6145-2479
  surname: Bachtold
  fullname: Bachtold, Adrian
  organization: The Barcelona Institute of Science and Technology
– sequence: 15
  givenname: Rui
  orcidid: 0000-0002-6163-2904
  surname: Yang
  fullname: Yang, Rui
  email: rui.yang@sjtu.edu.cn
  organization: Shanghai Jiao Tong University
– sequence: 16
  givenname: Philip X.-L.
  orcidid: 0000-0002-1083-2391
  surname: Feng
  fullname: Feng, Philip X.-L.
  email: philip.feng@ufl.edu
  organization: Department of Electrical and Computer Engineering, Herbert Wertheim College of Engineering
– sequence: 17
  givenname: Zenghui
  orcidid: 0000-0003-3743-7567
  surname: Wang
  fullname: Wang, Zenghui
  email: zenghui.wang@uestc.edu.cn
  organization: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China
BookMark eNp1kEtLAzEUhYNUrK2u3c5SkGnzmDzGhVCKLygKWsFdSNOMTZlJajKj-O-d0lFQ6OpeOOc793IGoOe8MwCcIThCEKOx0tEp50dYQ8Q4OQDHKCcshYK99n53ivpgEOMaQsoFZ0egTxikmRDwGIweWrwyeqWc1apMnkz0TtU-xMtk7j9VWCaT2ldWJ8-tbE7AYaHKaE67OQQvN9fz6V06e7y9n05mqco4rlOO8ZLSQmBOCMKIL9hCiNxoqLKcFiQruKDQYJoLjRiChuUaGyFoTjTBBWVkCK52uZtmUZmlNq4OqpSbYCsVvqRXVv5VnF3JN_8hc4ZhhnAbcN4FBP_emFjLykZtylI545soMYc5J5zB7S26s-rgYwymkNrWqrZ-m2xLiaDcdi27rmXXdcuN_3E_7-0nLnZEK8i1b4JrO9zr_gZy25GI
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ContentType Journal Article
Copyright 2022 The Authors. Published by American Chemical Society
2022 The Authors. Published by American Chemical Society 2022 The Authors
Copyright_xml – notice: 2022 The Authors. Published by American Chemical Society
– notice: 2022 The Authors. Published by American Chemical Society 2022 The Authors
DBID AAYXX
CITATION
7X8
5PM
DOI 10.1021/acsnano.2c01673
DatabaseName CrossRef
MEDLINE - Academic
PubMed Central (Full Participant titles)
DatabaseTitle CrossRef
MEDLINE - Academic
DatabaseTitleList
MEDLINE - Academic
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1936-086X
EndPage 15585
ExternalDocumentID PMC9620412
10_1021_acsnano_2c01673
e381370
GrantInformation_xml – fundername: ;
  grantid: ECCS-1454570
– fundername: ;
  grantid: 2017SGR1664
– fundername: ;
  grantid: PCI2022-132951
– fundername: ;
  grantid: ZYGX2020ZB014
– fundername: ;
  grantid: 21ZR1433800
– fundername: ;
  grantid: LG-QS-202202-11
– fundername: ;
  grantid: U21A20505
– fundername: ;
  grantid: CEX2019-000910-S
– fundername: ;
  grantid: 692876
– fundername: ;
  grantid: 19YF1424900
GroupedDBID ---
.K2
23M
4.4
55A
5GY
5VS
6J9
7~N
AABXI
ABFRP
ABMVS
ABQRX
ABUCX
ACGFO
ACGFS
ACS
ADHLV
AEESW
AENEX
AFEFF
AHGAQ
ALMA_UNASSIGNED_HOLDINGS
AQSVZ
CS3
EBS
ED~
F5P
GGK
GNL
IH9
IHE
JG~
P2P
RNS
ROL
UI2
VF5
VG9
W1F
XKZ
YZZ
AAHBH
AAYXX
ABBLG
ABJNI
ABLBI
ACBEA
ADHGD
BAANH
CITATION
CUPRZ
7X8
5PM
ID FETCH-LOGICAL-a472t-722d55f827331217b6b889ec0a495f34f7850e2598c1610e69c2e88593c32f563
IEDL.DBID ACS
ISSN 1936-0851
1936-086X
IngestDate Thu Aug 21 18:38:34 EDT 2025
Fri Jul 11 16:17:58 EDT 2025
Tue Jul 01 03:37:29 EDT 2025
Thu Apr 24 22:58:00 EDT 2025
Thu Oct 27 05:08:52 EDT 2022
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 10
Keywords one-dimensional materials
sensing
radio frequency
quantum engineering
signal processing
dynamic range
two-dimensional materials
nanoelectromechanical systems
resonators
frequency tuning
Language English
License https://creativecommons.org/licenses/by-nc-nd/4.0
Permits non-commercial access and re-use, provided that author attribution and integrity are maintained; but does not permit creation of adaptations or other derivative works (https://creativecommons.org/licenses/by-nc-nd/4.0/).
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-a472t-722d55f827331217b6b889ec0a495f34f7850e2598c1610e69c2e88593c32f563
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
ObjectType-Review-3
content type line 23
ORCID 0000-0003-4705-771X
0000-0001-6757-3442
0000-0003-0492-2478
0000-0001-6325-7231
0000-0002-6163-2904
0000-0002-1429-6995
0000-0003-0262-2017
0000-0003-4106-6762
0000-0002-1083-2391
0000-0002-9663-4491
0000-0002-3104-1855
0000-0003-3743-7567
0000-0002-6145-2479
0000-0002-1866-2649
0000-0002-5495-7612
0000-0001-7906-8902
0000-0002-6465-6506
OpenAccessLink https://pubmed.ncbi.nlm.nih.gov/PMC9620412
PMID 36054880
PQID 2709737606
PQPubID 23479
PageCount 41
ParticipantIDs pubmedcentral_primary_oai_pubmedcentral_nih_gov_9620412
proquest_miscellaneous_2709737606
crossref_citationtrail_10_1021_acsnano_2c01673
crossref_primary_10_1021_acsnano_2c01673
acs_journals_10_1021_acsnano_2c01673
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 2022-10-25
PublicationDateYYYYMMDD 2022-10-25
PublicationDate_xml – month: 10
  year: 2022
  text: 2022-10-25
  day: 25
PublicationDecade 2020
PublicationTitle ACS nano
PublicationTitleAlternate ACS Nano
PublicationYear 2022
Publisher American Chemical Society
Publisher_xml – name: American Chemical Society
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SSID ssj0057876
Score 2.6538565
SecondaryResourceType review_article
Snippet The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important...
The quest for realizing and manipulating ever smaller man-made movable structures and dynamical machines has spurred tremendous endeavors, led to important...
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StartPage 15545
SubjectTerms Review
Title Nanomechanical Resonators: Toward Atomic Scale
URI http://dx.doi.org/10.1021/acsnano.2c01673
https://www.proquest.com/docview/2709737606
https://pubmed.ncbi.nlm.nih.gov/PMC9620412
Volume 16
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1LT8MwDI5gXODAGzFeKhIHLi1t2rQpt2limpDgsk3arUqzRCAgRbS78Oux2-5RpgnOeUiundhfbX8h5EaoWAdCKBvMAQCKFNxOtWI2hBqhnvB04nrYKPz0HPZHweOYjRdk0b8z-NS7EzI3wmQOlVgx72-SLRryCHFWpzuYXbpod2GVQAaADFHEnMVnZQN0QzJvuqFFbNmsjFxyNb29qkgrLxkKscLkzZkWqSO_V_kb_5Zin-zWAafVqSzkgGwoc0h2lmgIj4gDV2z2obAHGFVm4S99g2A8v7eGZVmt1Smwe9kawLA6JqPew7Dbt-t3FGwRRLSwI0onjGlO8X1GgCBpmHIeK-kKQEfaD3TEmasAB3EJ8Z-rwlhSxZEITfpUs9A_IS2TGXVKrNhNmfZkoCc-9myFsY5xF864qz0lvTZoX-ZJfQ7ypExxUy-pxU9q8dvEmX39RNZc5Pgkxvv6BbfzBZ8VDcf6qdczdSZwVDD_IYzKpnlCI-QmigCytUnU0PN8TyTbbo6Y15eSdDtG4n6Pnv1PwHOyTbFPApwcZRekVXxN1SVEL0V6VdrtD6Bp6xA
linkProvider American Chemical Society
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LT4NAEJ5UPagH38b6xMSDFxAWFhZvTaOpjzYxtklvBLa70ajUCL34652hUEVjoleWnTCZ2Z352JlvAU5iFWovjpWJ7oAARcbCTLTiJqYavh6JZGQ71Cjc7fmdgXc95MMG2FUvDH5EhpKy4hD_k13AOcNnaZyOLSapcN6dgwVMRRjBrVb7vtp7yf386Tky4mRMJmZkPj8EUDSSWT0afaaY9QLJLxHnchXuZt9aFJo8WZM8seT7NxrH_yizBitl-mm0pv6yDg2VbsDyF1LCTbBwwx2_KOoIJgMa9IM_JWienRv9osjWaOXUy2zc47DagsHlRb_dMctbFczYC1huBoyNONeC0W2NCEgSPxEiVNKOEStp19OB4LZCVCQkZoO28kPJlCBaNOkyzX13G-bTcap2wAjthGtHenrkUgeXH-qQpAgubO0o6TTRF2QWlasii4oDb-ZEpfpRqX4TrMoIkSyZyemCjOffJ5zOJrxOSTl-f_W4smqEC4dOQ-JUjSdZxAJiKgoQwDUhqJl7JpOot-sj6eNDQcEdEo2_w3b_puARLHb63dvo9qp3swdLjDooMPwxvg_z-dtEHWBekyeHhSt_AEgL83E
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LT4NAEN5oTYwefBvrExMPXkBYWFi8NdWmvhqTtklvBJbdaFRohF789c5QikVjoleWnbCZ2Z35mJlvCTkLpa-cMJQ6mAMAFBFyPVKS6RBquCrmUWxa2Cj80HO7Q-d2xEZlUxj2wsBHZCApK5L4uKvHsSoZBqwLeJ6ESWpQgcXz9iJZwqQdQq5Wuz87f9EE3WkuGbAyBBQVoc8PAeiRRFb3SF9hZr1Ics7rdNbJsPreotjkxZjkkSE-vlE5_ndBG2StDEO11tRuNsmCTLbI6hw54TYx4OBN3yR2BqMiNfzRnyBEzy61QVFsq7Vy7GnW-jAsd8iwcz1od_XydgU9dDya6x6lMWOKU7y1EYBJ5Eac-1KYIWAmZTvK48yUgI64gKjQlK4vqORIjyZsqphr75JGkiZyj2i-GTFlCUfFNnZyub7yUQpn3FSWFFYTbEJkQbk7sqBIfFMrKJcflMtvEmOmiECUDOV4Ucbr7xPOqwnjKTnH76-ezjQbwAbCrEiYyHSSBdRDxiIPgFyTeDWVVzKRgrs-kjw_FVTcPtL5W3T_bws8IcuPV53g_qZ3d0BWKDZSgBek7JA08veJPILwJo-OC2v-BDaV9fQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Nanomechanical+Resonators%3A+Toward+Atomic+Scale&rft.jtitle=ACS+nano&rft.au=Xu%2C+Bo&rft.au=Zhang%2C+Pengcheng&rft.au=Zhu%2C+Jiankai&rft.au=Liu%2C+Zuheng&rft.date=2022-10-25&rft.pub=American+Chemical+Society&rft.issn=1936-0851&rft.eissn=1936-086X&rft.volume=16&rft.issue=10&rft.spage=15545&rft.epage=15585&rft_id=info:doi/10.1021%2Facsnano.2c01673&rft.externalDocID=e381370
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1936-0851&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1936-0851&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1936-0851&client=summon