A 3 DOF Model for an Electromagnetic Air Mount
A 4×4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to an electromagnetic isolator. The model was derived from an assumption based on small- and low-frequency vibrations. The coordinates of the 3 DOF was composed of the 4 variables, rep...
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Published in | Advances in Acoustics and Vibration Vol. 2012; no. 2012; pp. 1 - 6 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Cairo, Egypt
Hindawi Limiteds
01.01.2012
Hindawi Puplishing Corporation Hindawi Publishing Corporation |
Online Access | Get full text |
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Summary: | A 4×4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to an electromagnetic isolator. The model was derived from an assumption based on small- and low-frequency vibrations. The coordinates of the 3 DOF was composed of the 4 variables, representing a vertical position, pitch, roll, and a proof term. The coordinates were calculated from the 4 position sensors in the isolator and formulated into a 4×4 matrix, which possesses inversive full rank. The electro-magnetic isolator was built for a simulated machine in semiconductor manufacturing and consisted of a heavy surface plate, sensors, amps, a controller, and air springs with electromagnets. The electromagnets are installed in a pneumatic chamber of the individual air spring. The performance of the 3 DOF model was experimented and compared with that of a 1 DOF model in an impact test. The settling time in the result was reduced to 25%. |
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ISSN: | 1687-6261 1687-627X |
DOI: | 10.1155/2012/218429 |