Production of Highly Homogeneous Si(100) Surfaces by H2O Etching: Surface Morphology and the Role of Strain
The etching of Si(100) surfaces in ultrapure water was studied with a combination of infrared spectroscopy (FTIR) and scanning tunneling microscopy (STM). While the FTIR results show that the initially rough H/Si(100) surface becomes highly homogeneous during etching, a phenomenon generally associat...
Saved in:
Published in | Journal of the American Chemical Society Vol. 128; no. 35; pp. 11455 - 11462 |
---|---|
Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Washington, DC
American Chemical Society
06.09.2006
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The etching of Si(100) surfaces in ultrapure water was studied with a combination of infrared spectroscopy (FTIR) and scanning tunneling microscopy (STM). While the FTIR results show that the initially rough H/Si(100) surface becomes highly homogeneous during etching, a phenomenon generally associated with surface smoothing, STM images reveal that the homogeneity is associated with the formation of well-defined etch hillocks. After many hours of etching, the resulting H-terminated surface is composed of stripes of atomically flat Si(100) terminated by etch hillocks bounded by {111}- and {110}-oriented microfacets. Polarization analysis of the Si−H stretching modes provides strong evidence for uniform dihydride-termination of the flat regions, with the narrow (∼25 Å) width of these stripes allowing for relaxation of steric strain between neighboring dihydrides. The unusual hill-and-valley etch morphology is attributed to the effects of steric strain on the reactivity of sites on the etched surface. |
---|---|
AbstractList | The etching of Si(100) surfaces in ultrapure water was studied with a combination of infrared spectroscopy (FTIR) and scanning tunneling microscopy (STM). While the FTIR results show that the initially rough H/Si(100) surface becomes highly homogeneous during etching, a phenomenon generally associated with surface smoothing, STM images reveal that the homogeneity is associated with the formation of well-defined etch hillocks. After many hours of etching, the resulting H-terminated surface is composed of stripes of atomically flat Si(100) terminated by etch hillocks bounded by {111}- and {110}-oriented microfacets. Polarization analysis of the Si-H stretching modes provides strong evidence for uniform dihydride-termination of the flat regions, with the narrow (approximately 25 A) width of these stripes allowing for relaxation of steric strain between neighboring dihydrides. The unusual hill-and-valley etch morphology is attributed to the effects of steric strain on the reactivity of sites on the etched surface. The etching of Si(100) surfaces in ultrapure water was studied with a combination of infrared spectroscopy (FTIR) and scanning tunneling microscopy (STM). While the FTIR results show that the initially rough H/Si(100) surface becomes highly homogeneous during etching, a phenomenon generally associated with surface smoothing, STM images reveal that the homogeneity is associated with the formation of well-defined etch hillocks. After many hours of etching, the resulting H-terminated surface is composed of stripes of atomically flat Si(100) terminated by etch hillocks bounded by {111}- and {110}-oriented microfacets. Polarization analysis of the Si−H stretching modes provides strong evidence for uniform dihydride-termination of the flat regions, with the narrow (∼25 Å) width of these stripes allowing for relaxation of steric strain between neighboring dihydrides. The unusual hill-and-valley etch morphology is attributed to the effects of steric strain on the reactivity of sites on the etched surface. |
Author | Green, Sara K Clark, Ian T Faggin, Marc F Queeney, K. T Hines, Melissa A |
Author_xml | – sequence: 1 givenname: Marc F surname: Faggin fullname: Faggin, Marc F – sequence: 2 givenname: Sara K surname: Green fullname: Green, Sara K – sequence: 3 givenname: Ian T surname: Clark fullname: Clark, Ian T – sequence: 4 givenname: K. T surname: Queeney fullname: Queeney, K. T – sequence: 5 givenname: Melissa A surname: Hines fullname: Hines, Melissa A |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18082546$$DView record in Pascal Francis https://www.ncbi.nlm.nih.gov/pubmed/16939268$$D View this record in MEDLINE/PubMed |
BookMark | eNpFkctOGzEUhq0KVELaRV-g8qYIFtP6MvHY3UG4BBVE1FC1O8szthOnEzvYMxLZseU1eRImJMDq6Oj_9Enn_PtgxwdvAPiC0XeMCP4xV4gRXBD_AfTwgKBsgAnbAT2EEMkKzuge2E9p3q054fgj2MNMUEEY7wE_jkG3VeOCh8HCkZvO6hUchUWYGm9Cm-DEHWKEjuCkjVZVJsGyy8kNPGuqmfPTn08Pj68ZvA5xOQt1mK6g8ho2MwN_h9qszZMmKuc_gV2r6mQ-b2cf_Dk_ux2Osqubi8vh8VWmaEGbrDQEiZyo0liMmTZMWMtEbrVllJaMGlRSijTVGulSC1TZXJCSKM4V19gI2gcHG-8yhrvWpEYuXKpMXauXoyTjhaAcsw78ugXbcmG0XEa3UHElXz_UAd-2gEqVqm1UvnLpneOIk0G-FmUbzqXG3L_lKv6XrKDFQN6OJ_L033B88gsX8u-7V1VJzkMbffcPiZFcNyrfGqXPudKRLg |
CODEN | JACSAT |
ContentType | Journal Article |
Copyright | Copyright © 2006 American Chemical Society 2007 INIST-CNRS |
Copyright_xml | – notice: Copyright © 2006 American Chemical Society – notice: 2007 INIST-CNRS |
DBID | BSCLL IQODW NPM 7X8 |
DOI | 10.1021/ja062172n |
DatabaseName | Istex Pascal-Francis PubMed MEDLINE - Academic |
DatabaseTitle | PubMed MEDLINE - Academic |
DatabaseTitleList | PubMed MEDLINE - Academic |
Database_xml | – sequence: 1 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Chemistry |
EISSN | 1520-5126 |
EndPage | 11462 |
ExternalDocumentID | 16939268 18082546 ark_67375_TPS_DXCPBK17_W b704251218 |
Genre | Journal Article |
GroupedDBID | - .K2 02 186 4.4 53G 55A 5GY 5RE 5VS 7~N 85S AABXI ABFLS ABMVS ABPPZ ABPTK ABUCX ABUFD ACGFS ACJ ACNCT ACS AEESW AENEX AETEA AFEFF AFFDN AFFNX AFMIJ AIDAL ALMA_UNASSIGNED_HOLDINGS ANTXH AQSVZ BAANH BKOMP CS3 DU5 DZ EBS ED ED~ EJD ET F20 F5P GJ GNL IH9 IHE JG JG~ K2 K78 LG6 NHB OHT P2P ROL RXW TAE TAF TN5 UHB UI2 UKR UNC UPT UQL VF5 VG9 VQA W1F WH7 X XFK YZZ ZCG ZE2 ZHY --- -DZ -ET -~X .DC .GJ 6TJ AAYOK ABFRP ABJNI ABQRX ACBEA ACGFO ADHLV AGHSJ AGXLV AHGAQ BSCLL GGK IH2 XOL XSW YQT ZCA ~02 .HR 1WB 3EH 3O- 41~ AAUPJ AAYJJ ABDEX ABHMW ABTAH ABWLT ACBNA ACKIV AFDAS AGJRR AI. D0S IQODW MVM P-O RNS UBC UBX VH1 X7L YXA YXE YYP ZGI ZY4 AAHBH CUPRZ NPM 7X8 |
ID | FETCH-LOGICAL-a373t-be20942abef116de69ff694fdf633b63e0b330d3dd0dbd90cf492b2a88a8d1e93 |
IEDL.DBID | ACS |
ISSN | 0002-7863 |
IngestDate | Fri Aug 16 07:23:48 EDT 2024 Sat Sep 28 07:39:56 EDT 2024 Sun Oct 29 17:07:35 EDT 2023 Wed Jan 17 04:51:15 EST 2024 Thu Aug 27 13:42:06 EDT 2020 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 35 |
Keywords | Water Infrared spectrometry Scanning tunneling microscopy Polarization Relaxation Fourier transformation Steric effect Morphology Chemical reactivity |
Language | English |
License | CC BY 4.0 |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-a373t-be20942abef116de69ff694fdf633b63e0b330d3dd0dbd90cf492b2a88a8d1e93 |
Notes | istex:4CB707D9B6030E130D073CA39935C4638CBCCA83 ark:/67375/TPS-DXCPBK17-W ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
PMID | 16939268 |
PQID | 68793816 |
PQPubID | 23479 |
PageCount | 8 |
ParticipantIDs | proquest_miscellaneous_68793816 pubmed_primary_16939268 pascalfrancis_primary_18082546 istex_primary_ark_67375_TPS_DXCPBK17_W acs_journals_10_1021_ja062172n |
ProviderPackageCode | JG~ 55A AABXI GNL VF5 7~N ACJ VG9 W1F ANTXH ACS AEESW AFEFF .K2 ABMVS ABUCX IH9 BAANH AQSVZ ED~ UI2 |
PublicationCentury | 2000 |
PublicationDate | 2006-09-06 |
PublicationDateYYYYMMDD | 2006-09-06 |
PublicationDate_xml | – month: 09 year: 2006 text: 2006-09-06 day: 06 |
PublicationDecade | 2000 |
PublicationPlace | Washington, DC |
PublicationPlace_xml | – name: Washington, DC – name: United States |
PublicationTitle | Journal of the American Chemical Society |
PublicationTitleAlternate | J. Am. Chem. Soc |
PublicationYear | 2006 |
Publisher | American Chemical Society |
Publisher_xml | – name: American Chemical Society |
SSID | ssj0004281 |
Score | 2.0471735 |
Snippet | The etching of Si(100) surfaces in ultrapure water was studied with a combination of infrared spectroscopy (FTIR) and scanning tunneling microscopy (STM).... |
SourceID | proquest pubmed pascalfrancis istex acs |
SourceType | Aggregation Database Index Database Publisher |
StartPage | 11455 |
SubjectTerms | Chemistry Exact sciences and technology General and physical chemistry |
Title | Production of Highly Homogeneous Si(100) Surfaces by H2O Etching: Surface Morphology and the Role of Strain |
URI | http://dx.doi.org/10.1021/ja062172n https://api.istex.fr/ark:/67375/TPS-DXCPBK17-W/fulltext.pdf https://www.ncbi.nlm.nih.gov/pubmed/16939268 https://search.proquest.com/docview/68793816 |
Volume | 128 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwhV1Nb9QwFHwq5QAXymfZAsUSCMEhVWzvOjY32LZagQor0oq9WXZsS6glqXazUuHEtX-zv4TneENBqHCNY8t648RjezwP4LljRtkq55mhI5kNTUEzgxN1VigZuHNmlLz0Dj6IydHw3Ww0W4NnV5zgs-gPlIuYRam-BtdZVA5G_jMuLy8_Mkl7jltIwXv7oN-rxqmnWiD_jKE7i_pHs8AQhJS74mpy2U0y-xuw21_VSdqS451la3eq7387N_6r_7fh1opkkjdpVNyBNV_fhRvjPrfbPainyegVQSFNIFHscfKNTJqvDY4n3ywXpPzykub5K1Iu5yGqtojFcvaR7LWd-PL1xY_zvowcNAhWtz1PTO0IUkryqTnxseWyS0FxH4729w7Hk2yVeSEzvOBtZj3DZR8z1gdKhfNChSDUMLggOLeC-9xynjsEM3fWqbwKQ8UsM1Ia6ahX_AGs103tHwKRxkt84JQtkCwogQTVIoUz8QasqgIdwDZCo1dfzkJ3h-IMFyV92AbwokNNnyb7DW3mx1GNVoz04bTUu7Px9O17WujP2NIfsP6qQGWy_R_A0x5njfGOJyOmi6kWEn9TkuIbmwn-y7pCIYMUcut_3XwEN9PuTDR1eAzr7XzpnyBfae12N15_AicZ41c |
link.rule.ids | 315,786,790,27109,27957,27958,57093,57143 |
linkProvider | American Chemical Society |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV1Nb9QwELWgHMqlfNPlo_UBITikiuONY3ODpdVCu2VFtmJvlh3bEmqbVJusBJy49m_2lzC2NywgIbjGseXMjONne_weQs9MpoSuUpookvNkqAqSKJiok0JwR41ReeTSmxyz8cnw_Tyfr2hy_F0Y6EQLLbXhEH_NLuBpglLmxZTq6-hGXsA63MOgUbm-A5lx0kPdgjPaswj9WtXPQFULMNRb8ItPg1QtWMJFCYu_Y8ww1xzciqJFoZchxeR0b9npverbHwSO__cZt9HWCnLi1zFG7qBrtr6LNke90ts9VE8j7Su4CDcO-9SPs6943Jw3EF22Wba4_PyCpOlLXC4XzudwYQ3l2Qe834VUzFdX3y_7MjxpwHVhsx6r2mAAmPhjc2Z9y2UQpLiPTg72Z6NxstJhSBQtaJdom8EiMFPaOkKYsUw4x8TQGcco1YzaVFOaGnBtarQRaeWGItOZ4lxxQ6ygD9BG3dR2G2GuLIcHRugCoINgAFc1ADrl78OKypEB2gGrydU4amU4Is9gidKbbYCeB-fJi0jGIdXi1OemFbmcTUv5dj6avjkkhfwELf3m3Z8VCI8iAAO027tbgr39OYkKNpWMw0-LE3jjYYyCdV0mAE8y_uhf3dxFm-PZ5EgevTs-fIxuxn0bT_fwBG10i6V9Ckim0zshhH8AK_3rwg |
linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV3LbtQwFLVKKwEbKI_CQB9eIASLVHE8cWx2dNrRQGk7Iq2YnWXHtlS1TapJRgJWbPlNvoRrJ-kDCcE2ji3n3uv42L4-B6FXJlFCFzGNFEl5NFQZiRRM1FEmuKPGqLTl0js4ZJOT4cdZOusWiv4uDHSihpbqcIjvR_WlcR3DgKcKipkXVCrvoJXUC3d7KDTKr-9BJpz0cDfjjPZMQjer-lmoqAGKeit-9amQqgZruFbG4u84M8w344fo6KqnIc3kbHvR6O3i-x8kjv__KavoQQc98fs2Vh6hJVs-RvdGveLbE1ROW_pXcBWuHPYpIOff8KS6qCDKbLWocX76hsTxW5wv5s7ncmEN5ckR3mtCSua7Xz9-9mX4oAIXhk17rEqDAWjiz9W59S3nQZjiKToZ7x2PJlGnxxApmtEm0jaBxWCitHWEMGOZcI6JoTOOUaoZtbGmNDbg4thoI-LCDUWiE8W54oZYQdfQclmV9jnCXFkOD4zQGUAIwQC2agB2yt-LFYUjA7QJlpPdeKplOCpPYKnSm22AXgcHysuWlEOq-ZnPUctSeTzN5e5sNN3ZJ5n8Ai3d8vBVBcJbMYAB2updLsHe_rxEBZtKxuHnxQm88ayNhOu6TACuZPzFv7q5he5Od8fy04fD_Zfofrt941kf1tFyM1_YDQA0jd4MUfwb1DnuPA |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Production+of+highly+homogeneous+Si%28100%29+surfaces+by+H2O+etching%3A+surface+morphology+and+the+role+of+strain&rft.jtitle=Journal+of+the+American+Chemical+Society&rft.au=Faggin%2C+Marc+F&rft.au=Green%2C+Sara+K&rft.au=Clark%2C+Ian+T&rft.au=Queeney%2C+K+T&rft.date=2006-09-06&rft.issn=0002-7863&rft.volume=128&rft.issue=35&rft.spage=11455&rft.epage=11462&rft_id=info:doi/10.1021%2Fja062172n&rft.externalDBID=NO_FULL_TEXT |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0002-7863&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0002-7863&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0002-7863&client=summon |