Chemical Patterns for Directed Self-Assembly of Lamellae-Forming Block Copolymers with Density Multiplication of Features

Lamellae-forming polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) films, with bulk period L 0, were directed to assemble on lithographically nanopatterned surfaces. The chemical pattern was comprised of “guiding” stripes of cross-linked polystyrene (X-PS) or poly(methyl methacrylate) (X-PMMA)...

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Published inMacromolecules Vol. 46; no. 4; pp. 1415 - 1424
Main Authors Liu, Chi-Chun, Ramírez-Hernández, Abelardo, Han, Eungnak, Craig, Gordon S. W, Tada, Yasuhiko, Yoshida, Hiroshi, Kang, Huiman, Ji, Shengxiang, Gopalan, Padma, de Pablo, Juan J, Nealey, Paul F
Format Journal Article
LanguageEnglish
Published Washington, DC American Chemical Society 26.02.2013
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