Accurate Location and Manipulation of Nanoscaled Objects Buried under Spin-Coated Films

• Published in: ACS nano Vol. 9; no. 6; pp. 6188 - 6195
• Main Authors: Rawlings, Colin, Wolf, Heiko, Hedrick, James L, Coady, Daniel J, Duerig, Urs, Knoll, Armin W
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 23.06.2015
• Subjects: maskless lithography; atomic force microscopy; spin coating; subsurface imaging; thermal scanning probe lithography

Detection and precise localization of nanoscale structures buried beneath spin-coated films are highly valuable additions to nanofabrication technology. In principle, the topography of the final film contains information about the location of the buried features. However, it is generally believed th...