Stability and Surface Topography Evolution in Nanoimprinted Polymer Patterns under a Thermal Gradient

• Published in: Macromolecules Vol. 43; no. 19; pp. 8191 - 8201
• Main Authors: Ding, Yifu, Qi, H. Jerry, Alvine, Kyle J, Ro, Hyun Wook, Ahn, Dae Up, Lin-Gibson, Sheng, Douglas, Jack F, Soles, Christopher L
• Format: Journal Article
• Language: English
• Published: Washington, DC American Chemical Society 12.10.2010
• Subjects: Applied sciences; Exact sciences and technology; Organic polymers; Physicochemistry of polymers; Properties and characterization; Structure, morphology and analysis; Monodispersed polymer; Annealing; Structure stability; Structure modification; Styrene polymer; Nanoimprint lithography; Surface topography; Experimental study; Mechanism of action; Thin film; Temperature gradient

Nanostructures created in polymer films by nanoimprint lithography are subject to large stresses, both those from the imprinting processes as well as stresses arising from the intrinsic thermodynamic instabilities. These stresses can induce nanostructure deformations that compromise the intended fun...