Layer Control of WSe2 via Selective Surface Layer Oxidation

• Published in: ACS nano Vol. 10; no. 7; pp. 6836 - 6842
• Main Authors: Li, Zhen, Yang, Sisi, Dhall, Rohan, Kosmowska, Ewa, Shi, Haotian, Chatzakis, Ioannis, Cronin, Stephen B
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 26.07.2016
• Subjects: oxidation; WSe2; photoluminescence; oxygen plasma; MoSe2; dichalcogenide

We report Raman and photoluminescence spectra of mono- and few-layer WSe2 and MoSe2 taken before and after exposure to a remote oxygen plasma. For bilayer and trilayer WSe2, we observe an increase in the photoluminescence intensity and a blue shift of the photoluminescence peak positions after oxyge...