Electrically Driven Varifocal Silicon Metalens

Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that stage, where a wide variety of static functionalities have been accomplished, most efforts are being directed toward achieving reconfigurabl...

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Published inACS photonics Vol. 5; no. 11; pp. 4497 - 4503
Main Authors Afridi, Adeel, Canet-Ferrer, Josep, Philippet, Laurent, Osmond, Johann, Berto, Pascal, Quidant, Romain
Format Journal Article
LanguageEnglish
Published American Chemical Society 21.11.2018
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Abstract Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that stage, where a wide variety of static functionalities have been accomplished, most efforts are being directed toward achieving reconfigurable optical elements. Here, we present our approach to an electrically controlled varifocal metalens operating in the visible frequency range. It relies on dynamically controlling the refractive index environment of a silicon metalens by means of an electric resistor embedded into a thermo-optical polymer. We demonstrate precise and continuous tuneability of the focal length and achieve focal length variation larger than the Rayleigh length for voltage as small as 12 V. The system time-response is of the order of 100 ms, with the potential to be reduced with further integration. Finally, the imaging capability of our varifocal metalens is successfully validated in an optical microscopy setting. Compared to conventional bulky reconfigurable lenses, the presented technology is a lightweight and compact solution, offering new opportunities for miniaturized smart imaging devices.
AbstractList Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that stage, where a wide variety of static functionalities have been accomplished, most efforts are being directed toward achieving reconfigurable optical elements. Here, we present our approach to an electrically controlled varifocal metalens operating in the visible frequency range. It relies on dynamically controlling the refractive index environment of a silicon metalens by means of an electric resistor embedded into a thermo-optical polymer. We demonstrate precise and continuous tuneability of the focal length and achieve focal length variation larger than the Rayleigh length for voltage as small as 12 V. The system time-response is of the order of 100 ms, with the potential to be reduced with further integration. Finally, the imaging capability of our varifocal metalens is successfully validated in an optical microscopy setting. Compared to conventional bulky reconfigurable lenses, the presented technology is a lightweight and compact solution, offering new opportunities for miniaturized smart imaging devices.
Author Philippet, Laurent
Canet-Ferrer, Josep
Osmond, Johann
Afridi, Adeel
Berto, Pascal
Quidant, Romain
AuthorAffiliation The Barcelona Institute of Science and Technology
ICREA- Institució Catalana de Recerca i Estudis Avançats
Neurophotonics Laboratory, CNRS UMR 8250
AuthorAffiliation_xml – name: The Barcelona Institute of Science and Technology
– name: Neurophotonics Laboratory, CNRS UMR 8250
– name: ICREA- Institució Catalana de Recerca i Estudis Avançats
Author_xml – sequence: 1
  givenname: Adeel
  orcidid: 0000-0001-5402-7485
  surname: Afridi
  fullname: Afridi, Adeel
  organization: The Barcelona Institute of Science and Technology
– sequence: 2
  givenname: Josep
  surname: Canet-Ferrer
  fullname: Canet-Ferrer, Josep
  organization: The Barcelona Institute of Science and Technology
– sequence: 3
  givenname: Laurent
  surname: Philippet
  fullname: Philippet, Laurent
  organization: The Barcelona Institute of Science and Technology
– sequence: 4
  givenname: Johann
  surname: Osmond
  fullname: Osmond, Johann
  organization: The Barcelona Institute of Science and Technology
– sequence: 5
  givenname: Pascal
  surname: Berto
  fullname: Berto, Pascal
  organization: Neurophotonics Laboratory, CNRS UMR 8250
– sequence: 6
  givenname: Romain
  surname: Quidant
  fullname: Quidant, Romain
  email: romain.quidant@icfo.eu
  organization: ICREA- Institució Catalana de Recerca i Estudis Avançats
BookMark eNp9j8tOAzEMRSNUJErpH7CYH5jBeTQzWaJSHlIRCx7bKJM6IlVIqmRA6t8zqF10xcqWr4_lc0kmMUUk5JpCQ4HRG2PL7jMNKXpbmq4HUKI7I1PGOdQCGJuc9BdkXsoWACgsuJRiSppVQDtkb00I--ou-x-M1YfJ3qVxVL364G2K1TMOJmAsV-TcmVBwfqwz8n6_els-1uuXh6fl7bo2TLGh7pVkruetRCOpZAIcbFrEzqJQC6Qta5WFXhlQfcusHHc2AFwY1jlwDgyfEXG4a3MqJaPTu-y_TN5rCvpPW59q66P2iMEBG1O9Td85jk_-j_wCXtxguQ
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ContentType Journal Article
DBID AAYXX
CITATION
DOI 10.1021/acsphotonics.8b00948
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Applied Sciences
EISSN 2330-4022
EndPage 4503
ExternalDocumentID 10_1021_acsphotonics_8b00948
b049477577
GroupedDBID 53G
ABMVS
ABUCX
ACGFS
ACS
AEESW
AENEX
AFEFF
ALMA_UNASSIGNED_HOLDINGS
EBS
EJD
GNL
IH9
JG
JG~
UI2
VF5
VG9
W1F
XKZ
AAYXX
ABQRX
ADHLV
AHGAQ
BAANH
CITATION
CUPRZ
GGK
ID FETCH-LOGICAL-a292t-b962fb376ea616240f0d7ee8ce495e17279c0b9a09b72c6616d0034a28f0ff0a3
IEDL.DBID ACS
ISSN 2330-4022
IngestDate Fri Aug 23 01:55:45 EDT 2024
Thu Aug 27 13:42:39 EDT 2020
IsPeerReviewed false
IsScholarly true
Issue 11
Keywords electro-thermo-optical control
varifocal metalens
reconfigurability
dielectric nanodisks
metasurfaces
Language English
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-a292t-b962fb376ea616240f0d7ee8ce495e17279c0b9a09b72c6616d0034a28f0ff0a3
ORCID 0000-0001-5402-7485
PageCount 7
ParticipantIDs crossref_primary_10_1021_acsphotonics_8b00948
acs_journals_10_1021_acsphotonics_8b00948
ProviderPackageCode JG~
GNL
VF5
XKZ
VG9
W1F
ACS
AEESW
AFEFF
ABMVS
ABUCX
IH9
UI2
PublicationCentury 2000
PublicationDate 2018-11-21
PublicationDateYYYYMMDD 2018-11-21
PublicationDate_xml – month: 11
  year: 2018
  text: 2018-11-21
  day: 21
PublicationDecade 2010
PublicationTitle ACS photonics
PublicationTitleAlternate ACS Photonics
PublicationYear 2018
Publisher American Chemical Society
Publisher_xml – name: American Chemical Society
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SSID ssj0001053664
Score 2.5051594
Snippet Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that...
SourceID crossref
acs
SourceType Aggregation Database
Publisher
StartPage 4497
Title Electrically Driven Varifocal Silicon Metalens
URI http://dx.doi.org/10.1021/acsphotonics.8b00948
Volume 5
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3PT8IwFH5RvHgRf0b8lR28eOhcy-i6I0EIMUEPiOG2tF0bjWQQNg7619s3RiAajZ7XNNvba7_va_u-AlzzqInlihExlCsSGiOJ0nFMOHqLC2ZU2MLi5MED74_C-3FrvBaKX3fwGb2VOp-9TAs0is19ofAonNiGHeagEcVWuzNcr6m4jOKlYxRzMh2lEVtVy_3QEWKSzjcwaQNcenV4XJXoLM-UvPmLQvn647tj4x_fex_2Kp7ptZeJcQBbJjuEesU5vWpE50fgd8t7cPBXTd69uzlOft6zE9AWQc4bvk5cqmTewDiS7hTvMYx63adOn1R3KBDJYlYQFXNmlZtFjOSUO_i2QRoZI7Rxysgge4l1oGIZxCpi2oE1T9GyRjJhA2sD2TyBWjbNzCl4qQgR0iVVIg3dI5UaqnRoI9VMqbTNBty4b06qMZAn5fY2o8lmIJIqEA0gq4gns6Wtxq_tz_7R9znsOlYjsGCQ0QuoFfOFuXTMoVBXZbp8ArNVwKc
link.rule.ids 315,786,790,2782,27107,27955,27956,57091,57141
linkProvider American Chemical Society
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LT4NAEJ7UetCL9Rnrk4MXDyC7wAJHU9tUbXvpI72RXdiNxoY2hR701ztLqW1MNOkVyGQYZvf7ht35FuCO-Y5uV_RNSZgwXSm5KeIwNJnWFg-oFK6nm5O7PdYeui9jb1wBb9ULg05kaCkrFvHX6gLkAa_N3qa51ovNrEDoHXHBDux6PgKeZkSN_vrXCiYWK4SjKFbrukKiq6a5PwxpaIqzDWjawJhWDUY_3hVbSz6sRS6s-OuXcOPW7h_CQck6jcdlmhxBRabHUCsZqFGO7-wErGZxKo7-cJNP42mup0JjhOW00pBn9N8nmDip0ZVI2bH-PYVhqzlotM3yRAWT05DmpggZVQLnFMkZYQjmyk58KYNYYp0kNZcJY1uE3A6FT2OEbpZoARtOA2UrZXPnDKrpNJXnYCSBqwGeExEkLt4SiSQidpUvnIRw5dThHt85KkdEFhWL3ZREm4GIykDUwVwFPpotRTb-ff5iC9u3sNcedDtR57n3egn7yHcC3UpIyRVU8_lCXiOnyMVNkUHfnILJEg
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LT8MwDI5gSIgL4ynGswcuHDKatEvT47SHeG1CGkMTl6ppE4GYumntDvDrsbsOKiSQ4NpWVuLY-ewm_kzIufAcLFf0qGZCUVfrkKrI96lAbnHJtXIbWJzc64uroXszaoxKrb5gEClISvNDfPTqaWwKhgF2Cc-nz5MMOWPTulR4K06ukrWGx1z0yWZr8PV7BYxL5ORRHDJ2zJL4snDuB0EIT1FagqcSznSr5OlzhPn1ktf6PFP16P0beeO_prBFNovo02ouzGWbrOhkh1SLSNQq_DzdJfVO3h0HF3D8ZrVnuCVaj5BWG4Q-a_AyBgNKrJ6G0B3y4D0y7HYeWle06KxAQ-7zjCpfcKNgb9GhYAJA3dixp7WMNORLGmMaP7KVH9q-8ngEEC5iJLIJuTS2MXbo7JNKMkn0AbFi6SLQh0zJ2IVXKtZMRa7xlBOz0Dg1cgFzDgrPSIP80JuzoKyIoFBEjdCl8oPpgmzj1-8P_yD7jKzft7vB3XX_9ohsQNgjsaKQs2NSyWZzfQKhRaZOcyP6AB_fy4w
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Electrically+Driven+Varifocal+Silicon+Metalens&rft.jtitle=ACS+photonics&rft.au=Afridi%2C+Adeel&rft.au=Canet-Ferrer%2C+Josep&rft.au=Philippet%2C+Laurent&rft.au=Osmond%2C+Johann&rft.date=2018-11-21&rft.pub=American+Chemical+Society&rft.issn=2330-4022&rft.eissn=2330-4022&rft.volume=5&rft.issue=11&rft.spage=4497&rft.epage=4503&rft_id=info:doi/10.1021%2Facsphotonics.8b00948&rft.externalDocID=b049477577
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2330-4022&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2330-4022&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2330-4022&client=summon