Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition

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Published inChemistry of materials Vol. 24; no. 11; pp. 1992 - 1994
Main Authors Dendooven, Jolien, Goris, Bart, Devloo-Casier, Kilian, Levrau, Elisabeth, Biermans, Ellen, Baklanov, Mikhail R, Ludwig, Karl F, Voort, Pascal Van Der, Bals, Sara, Detavernier, Christophe
Format Journal Article
LanguageEnglish
Published United States American Chemical Society 12.06.2012
Subjects
porous film
ALD
X-ray fluorescence
electron tomography
ellipsometric porosimetry
mesoporous titania
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Author Baklanov, Mikhail R
Detavernier, Christophe
Devloo-Casier, Kilian
Goris, Bart
Biermans, Ellen
Voort, Pascal Van Der
Ludwig, Karl F
Dendooven, Jolien
Levrau, Elisabeth
Bals, Sara
AuthorAffiliation IMEC
Ghent University
Boston University
University of Antwerp
AuthorAffiliation_xml – name: Ghent University
– name: IMEC
– name: University of Antwerp
– name: Boston University
Author_xml – sequence: 1
  givenname: Jolien
  surname: Dendooven
  fullname: Dendooven, Jolien
  email: jolien.dendooven@ugent.be
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  givenname: Bart
  surname: Goris
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  givenname: Kilian
  surname: Devloo-Casier
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  givenname: Elisabeth
  surname: Levrau
  fullname: Levrau, Elisabeth
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  givenname: Ellen
  surname: Biermans
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  surname: Bals
  fullname: Bals, Sara
– sequence: 10
  givenname: Christophe
  surname: Detavernier
  fullname: Detavernier, Christophe
BackLink https://www.osti.gov/biblio/1069574$$D View this record in Osti.gov
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10.1039/b417310d
10.1021/nl060413j
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Issue 11
Keywords porous film
ALD
X-ray fluorescence
electron tomography
ellipsometric porosimetry
mesoporous titania
Language English
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StartPage 1992
Title Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition
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https://www.osti.gov/biblio/1069574
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