Study on Growth Quality of GaN Deposition on Nanopillar-Patterned Substrates: Microstructure Characterization and Crystalline Quality Optimization

• Published in: Crystal growth & design Vol. 24; no. 19; pp. 8020 - 8030
• Main Authors: Li, Lianxin, Gao, Tinghong, Chen, Qian, Huang, Jin
• Format: Journal Article
• Language: English
• Published: American Chemical Society 02.10.2024

The preparation of gallium nitride (GaN) film materials has significant importance in the semiconductor and thermoelectric sectors, serving as essential core materials for chips, power supply, and communication applications. The production of GaN thin films with reduced defect density has emerged as...