Complex Thermal Chemistry of Vinyltrimethylsilane on Si(100)-2×1

The surface chemistry of vinyltrimethylsilane (VTMS) on Si(100)-2×1 has been investigated using multiple internal reflection−Fourier transform infrared spectroscopy, Auger electron spectroscopy, and thermal desorption mass spectrometry. Molecular adsorption of VTMS at submonolayer coverages is domin...

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Bibliographic Details
Published inThe journal of physical chemistry. B Vol. 109; no. 17; pp. 8462 - 8468
Main Authors Pirolli, Laurent, Teplyakov, Andrew V
Format Journal Article
LanguageEnglish
Published American Chemical Society 05.05.2005
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