Thermal Conductivity of β‑Phase Ga2O3 and (Al x Ga1– x )2O3 Heteroepitaxial Thin Films

• Published in: ACS applied materials & interfaces Vol. 13; no. 32; pp. 38477 - 38490
• Main Authors: Song, Yiwen, Ranga, Praneeth, Zhang, Yingying, Feng, Zixuan, Huang, Hsien-Lien, Santia, Marco D, Badescu, Stefan C, Gonzalez-Valle, C. Ulises, Perez, Carlos, Ferri, Kevin, Lavelle, Robert M, Snyder, David W, Klein, Brianna A, Deitz, Julia, Baca, Albert G, Maria, Jon-Paul, Ramos-Alvarado, Bladimir, Hwang, Jinwoo, Zhao, Hongping, Wang, Xiaojia, Krishnamoorthy, Sriram, Foley, Brian M, Choi, Sukwon
• Format: Journal Article
• Language: English
• Published: United States American Chemical Society 18.08.2021; American Chemical Society (ACS)
• Subjects: aluminum gallium oxide; Functional Inorganic Materials and Devices; gallium oxide; heteroepitaxy; MATERIALS SCIENCE; thermal boundary conductance; thermal conductivity; aluminum gallium oxide; thermal boundary conductance; gallium oxide; heteroepitaxy; thermal conductivity

Heteroepitaxy of β-phase gallium oxide (β-Ga2O3) thin films on foreign substrates shows promise for the development of next-generation deep ultraviolet solar blind photodetectors and power electronic devices. In this work, the influences of the film thickness and crystallinity on the thermal conduct...