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METHOD OF GROWING THICK OXIDE FILMS AT LOW TEMPERATURE OF THERMAL OXIDE QUALITY
VERHAVERBEKE, Steven, COLOMBEAU, Benjamin, SWENBERG, Johanes F, LESCHKIES, Kurtis
Year of Publication 07.12.2022
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Year of Publication 07.12.2022
Patent
Conformal oxidation processes for 3D NAND
Swenberg, Johanes F, Kim, Taewan, Olsen, Christopher S, Hansen, Erika
Year of Publication 03.05.2022
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Year of Publication 03.05.2022
Patent
TREATMENTS TO IMPROVE DEVICE PERFORMANCE
WANG, Linlin, COLOMBEAU, Benjamin, SWENBERG, Johanes F, DONG, Lin, HUNG, Steven C.H
Year of Publication 10.01.2024
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Year of Publication 10.01.2024
Patent
METHOD OF GROWING THICK OXIDE FILMS AT LOW TEMPERATURE OF THERMAL OXIDE QUALITY
VERHAVERBEKE, Steven, COLOMBEAU, Benjamin, SWENBERG, Johanes F, LESCHKIES, Kurtis
Year of Publication 26.01.2022
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Year of Publication 26.01.2022
Patent
Gate all around I/O engineering
Guarini, Theresa Kramer, Swenberg, Johanes F, Lee, Byeong Chan, Bevan, Malcolm J, Colombeau, Benjamin, Hung, Steven C. H, Lo, Andy
Year of Publication 05.03.2024
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Year of Publication 05.03.2024
Patent
TREATMENTS TO IMPROVE DEVICE PERFORMANCE
WANG, Linlin, COLOMBEAU, Benjamin, SWENBERG, Johanes F, DONG, Lin, HUNG, Steven C.H
Year of Publication 09.09.2022
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Year of Publication 09.09.2022
Patent
TITANIUM LINER TO REDUCE METAL CONTAMINATION
NAGORNY, Vladimir, GUARINI, Theresa Kramer, SWENBERG, Johanes F, LIU, Wei
Year of Publication 19.11.2020
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Year of Publication 19.11.2020
Patent
METHOD OF GROWING THICK OXIDE FILMS AT LOW TEMPERATURE OF THERMAL OXIDE QUALITY
VERHAVERBEKE, Steven, COLOMBEAU, Benjamin, SWENBERG, Johanes F, LESCHKIES, Kurtis
Year of Publication 24.09.2020
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Year of Publication 24.09.2020
Patent
CONFORMAL OXIDATION PROCESSES FOR 3D NAND
KIM, Taewan, HANSEN, Erika, SWENBERG, Johanes F, OLSEN, Christopher S
Year of Publication 18.06.2020
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Year of Publication 18.06.2020
Patent
METHODS AND APPARATUS FOR SILICON-GERMANIUM PRE-CLEAN
KUNG, Sheng-Chin, BEVAN, Malcolm, DUBE, Abhishek, SWENBERG, Johanes F
Year of Publication 14.05.2020
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Year of Publication 14.05.2020
Patent
Gate All Around I/O Engineering
Guarini, Theresa Kramer, Swenberg, Johanes F, Lee, Byeong Chan, Bevan, Malcolm J, Hung, Steven C.H, Colombeau, Benjamin, Lo, Andy
Year of Publication 15.12.2022
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Year of Publication 15.12.2022
Patent
METHODS OF FORMING SILICON-CONTAINING LAYERS
DUBE, Abhishek, COLOMBEAU, Benjamin, SWENBERG, Johanes F, HUNG, Steven C.H
Year of Publication 12.03.2020
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Year of Publication 12.03.2020
Patent
Methods Of Forming Silicon-Containing Layers
Dube, Abhishek, Swenberg, Johanes F, Hung, Steven C.H, Colombeau, Benjamin
Year of Publication 05.03.2020
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Year of Publication 05.03.2020
Patent
Gate interface engineering with doped layer
Dube, Abhishek, Kung, Sheng-Chin, Liu, Patricia M, Swenberg, Johanes F, Bevan, Malcolm J, Colombeau, Benjamin, Hung, Steven C. H
Year of Publication 27.09.2022
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Year of Publication 27.09.2022
Patent
Gate all around I/O engineering
Guarini, Theresa Kramer, Swenberg, Johanes F, Lee, Byeong Chan, Bevan, Malcolm J, Colombeau, Benjamin, Hung, Steven C. H, Lo, Andy
Year of Publication 20.09.2022
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Year of Publication 20.09.2022
Patent
TITANIUM LINER TOREDUCE METAL CONTAMINATION
LIU WEI, NAGORNY VLADIMIR, GUARINI THERESA KRAMER, SWENBERG JOHANES F
Year of Publication 24.06.2024
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Year of Publication 24.06.2024
Patent
Treatments To Improve Device Performance
Dong, Lin, Wang, Linlin, Swenberg, Johanes F, Hung, Steven C.H, Colombeau, Benjamin
Year of Publication 24.06.2021
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Year of Publication 24.06.2021
Patent