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SERISKY, Ron » SARISKY, Ron
SERISKY, Ron » SARISKY, Ron
Enhanced substrate temperature measurement apparatus, system and method
Stone, Dale K, Sun, Dawei, Lischer, D. Jeffrey, Anella, Steven, Serisky, Ron, Chen, Qin, Stone, Lyudmila, Cheng, Chi-Yang
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
Patent
CARBON NANOTUBE ELECTROSTATIC CHUCK
ANELLA, Steven M, SUN, Dawei, CHEN, Qin, CHIPMAN, David J, SERISKY, Ron, BLAKE, Julian G
Year of Publication 29.07.2021
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Year of Publication 29.07.2021
Patent
CARBON NANOTUBE ELECTROSTATIC CHUCK
Chipman, David J, Sun, Dawei, Anella, Steven M, Serisky, Ron, Chen, Qin, Blake, Julian G
Year of Publication 22.07.2021
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Year of Publication 22.07.2021
Patent
Carbon nanotube electrostatic chuck
Chipman, David J, Sun, Dawei, Anella, Steven M, Serisky, Ron, Chen, Qin, Blake, Julian G
Year of Publication 20.07.2021
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Year of Publication 20.07.2021
Patent
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND METHOD
STONE, Lyudmila, CHENG, Chi-Yang, SUN, Dawei, CHEN, Qin, LISCHER, Jeffrey D, STONE, Dale K, ANELLA, Steven, SERISKY, Ron
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
Patent
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND METHOD
Stone, Dale K, Sun, Dawei, Lischer, D. Jeffrey, Anella, Steven, Serisky, Ron, Chen, Qin, Stone, Lyudmila, Cheng, Chi-Yang
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
Patent
Platen, assembly for holding workpiece, and electrostatic chuck
SUN, DA-WEI, CHIPMAN, DAVID J, ANELLA, STEVEN M, RON, SERISKY, BLAKE, JULIAN G, CHEN, QIN
Year of Publication 16.11.2021
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Year of Publication 16.11.2021
Patent
Enhanced substrate temperature measurement apparatus, processing system and method
SUN, DAWEI, ANELLA, STEVEN, LISCHER, D. JEFFREY, STONE, DALE K, CHENG, CHI-YANG, RON, SERISKY, CHEN, QIN, STONE, LYUDMILA
Year of Publication 16.03.2021
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Year of Publication 16.03.2021
Patent