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Year of Publication 11.09.2007
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Year of Publication 09.12.2008
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Year of Publication 09.12.2008
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Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR
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Year of Publication 09.12.2008
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Year of Publication 09.12.2008
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Film bulk acoustic-wave resonator and method for manufacturing the same
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Year of Publication 06.03.2007
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Year of Publication 06.03.2007
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Film bulk acoustic-wave resonator and method for manufacturing the same
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Year of Publication 21.12.2006
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Year of Publication 14.12.2006
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Year of Publication 14.12.2006
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