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Ionic Liquids as Additives to Polystyrene-Block-Poly(Methyl Methacrylate) Enabling Directed Self-Assembly of Patterns with Sub-10 nm Features
Chen, Xuanxuan, Zhou, Chun, Chen, Shuang-Jun, Craig, Gordon S. W, Rincon-Delgadillo, Paulina, Dazai, Takahiro, Miyagi, Ken, Maehashi, Takaya, Yamazaki, Akiyoshi, Gronheid, Roel, Stoykovich, Mark P, Nealey, Paul F
Published in ACS applied materials & interfaces (16.05.2018)
Published in ACS applied materials & interfaces (16.05.2018)
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Journal Article
Influence of Additives on the Interfacial Width and Line Edge Roughness in Block Copolymer Lithography
Sunday, Daniel F, Chen, Xuanxuan, Albrecht, Thomas R, Nowak, Derek, Rincon Delgadillo, Paulina, Dazai, Takahiro, Miyagi, Ken, Maehashi, Takaya, Yamazaki, Akiyoshi, Nealey, Paul F, Kline, R. Joseph
Published in Chemistry of materials (24.03.2020)
Published in Chemistry of materials (24.03.2020)
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Journal Article