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Search Results - 南京工程学院 工业中心,211167%东南大学 MEMS教育部重点实验室，南京，210096
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MEMS表面加工中材料层厚度电学测试结构
by
钱晓霞
,
李伟华
Published in
南京信息工程大学学报
(2013)
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Journal Article
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微电机系统
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材料层
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电测量
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表面加工
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Chinese
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