by van der Zouw, Kees, Aarnink, Antonius A. I., Schmitz, Jurriaan, Kovalgin, Alexey Y.
Published in IEEE transactions on semiconductor manufacturing (01.05.2020)

by van der Zouw, Kees, Dulfer, Simone D., Aarnink, Antonius A.I., Kovalgin, Alexey Y.
Published in 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS) (15.04.2024)

by van der Wel, Bernhard Y., van der Zouw, Kees, Aarnink, Antonius A. I., Kovalgin, Alexey Y.
Published in Journal of physical chemistry. C (31.08.2023)

by van der Zouw, Kees, van der Wel, Bernhard Y., Aarnink, Antonius A. I., Wolters, Rob A. M., Gravesteijn, Dirk J., Kovalgin, Alexey Y.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2023)

by van der Zouw, Kees, Aarnink, Antonius A.I., Schmitz, Jurriaan, Kovalgin, Alexey Y.
Published in 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) (01.03.2019)