Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry
van de Ven, Tijn H. M., Reefman, Pim, Osorio, Edgar A., Banine, Vadim Y., Beckers, Job
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
Published in 2016 IEEE International Conference on Plasma Science (ICOPS) (01.06.2016)
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