Comparative study of 3D measurement techniques (SPM, SEM, TEM) for submicron structures
van Helleputte, Henri R.J.R., Haddeman, Theo B.J., Verheijen, Martin J., Baalbergen, Jan-Jaap
Published in Microelectronic engineering (01.02.1995)
Published in Microelectronic engineering (01.02.1995)
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Conference Proceeding
Intermediate structure for manufacture of plasma addressed liquid crystal display field
BRUININK, JACOB, BUZAK, THOMAS S, ILCISIN, KEVIN J, HELLEPUTTE, HENRI R.J.R. VAN, BURGMANS, ADRIANUS L.J, BIGGELAAR, HANS DEN, KHAN, BABAR A, MARTIN, PAUL C, BONGAERTS, PETRUS F.G
Year of Publication 19.08.1999
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Year of Publication 19.08.1999
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E-BEAM LITHOGRAFIE MET ACHTERGRONDBELICHTING IN NABURIG GEBIED
VAN HELLEPUTTE HENRI R.J.R, VERHEIJEN MARTINUS J, BINSMA JOHANNES J.M
Year of Publication 01.08.1995
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Year of Publication 01.08.1995
Patent