Radiation measurement system
Op 'T Root, Wilhelmus Patrick Elisabeth Maria, Godfried, Herman Philip
Year of Publication 03.10.2023
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Year of Publication 03.10.2023
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Pulse stretcher and method
Op 'T Root, Wilhelmus Patrick Elisabeth Maria, Godfried, Herman Philip
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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Control system and method
Op 'T Root, Wilhelmus Patrick Elisabeth Maria, Godfried, Herman Philip, Everts, Frank
Year of Publication 29.03.2022
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Year of Publication 29.03.2022
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Reducing speckle in an excimer light source
op 't Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 27.06.2023
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Year of Publication 27.06.2023
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REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
op 't Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 05.08.2021
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Year of Publication 05.08.2021
Patent
Reducing speckle in an excimer light source
op 't Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
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Illumination system
Op 'T Root, Wilhelmus Patrick Elisabeth Maria, Godfried, Herman Philip, Van Bussel, Hubertus Petrus Leonardus Henrica
Year of Publication 04.12.2018
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Year of Publication 04.12.2018
Patent
REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
op 't Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 24.10.2019
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Year of Publication 24.10.2019
Patent
Reducing speckle in an excimer light source
op 't Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 22.10.2019
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Year of Publication 22.10.2019
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Lithographic apparatus and method
Op 'T Root Wilhelmus Patrick Elisabeth Maria, Godfried Herman Philip, Rijke Arij Jonathan, Van Bussel Hubertus Petrus Leonardus Henrica
Year of Publication 03.04.2018
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Year of Publication 03.04.2018
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METHOD FOR FOCUS METROLOGY AND ASSOCIATED APPARATUSES
OP 'T ROOT, Wilhelmus, Patrick, Elisabeth, Maria, VAN LARE, Marie-Claire
Year of Publication 29.03.2023
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Year of Publication 29.03.2023
Patent
REDUCING SPECKLE IN AN EXCIMER LIGHT SOURCE
op `t Root, Wilhelmus Patrick Elisabeth Maria, Thornes, Joshua Jon, Godfried, Herman Philip, King, Brian Edward, Everts, Frank, Duffey, Thomas Patrick
Year of Publication 19.07.2018
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Year of Publication 19.07.2018
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Substrate comprising a target arrangement, associated patterning device and metrology method
OP 'T ROOT Wilhelmus Patrick Elisabeth Maria, GARCIA GRANDA Miguel, VAN DER SCHAAR Maurits, CRAMER Hugo Augustinus Joseph, VAN DEN BOS Karel Hendrik Wouter
Year of Publication 01.08.2024
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Year of Publication 01.08.2024
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Method of controlling a radiation source and lithographic apparatus comprising the radiation source
Everts Frank, Stolk Roland Pieter, Bommer Adrianus Leonardus Gertrudus, De Jong Robert, Op 'T Root Wilhelmus Patrick Elisabeth Maria, Godfried Herman Philip, Van Der Veen Paul
Year of Publication 09.05.2017
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Year of Publication 09.05.2017
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Pulse Stretcher and Method
OP 'T ROOT, Wilhelmus Patrick Elisabeth Maria, GODFRIED, Herman Philip
Year of Publication 04.11.2021
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Year of Publication 04.11.2021
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