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Multi-patterning conflict free integrated circuit design
WEN-JU YANG, CHINANG HSU, YI-KAN CHENG, KEN-HSIEN HSIEH, HUNGLUNG LIN, CHING HSIANG CHANG, WEN-LI CHENG, TSONG-HUA OU, TING YU CHEN, LIUN TIEN, CHIEN LIN HO
Year of Publication 08.07.2015
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Year of Publication 08.07.2015
Patent
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Multi-patterning conflict free integrated circuit design
HSIEH KEN-HSIEN, TIEN LIUN, CHANG CHING HSIANG, OU TSONG-HUA, HSU CHINANG, LIN HUNG LUNG, YANG WEN-JU, CHEN TING YU, CHENG WEN-LI, CHENG YI-KAN, HO CHIEN LIN
Year of Publication 05.05.2015
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Year of Publication 05.05.2015
Patent
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Method and system for multi-patterning layout decomposition
HSU CHINANG, HSU CHIN-HSIUNG, HOU YUAN-TE, YANG WEN-JU, HO GODINA, CHEN WEN-HAO
Year of Publication 29.12.2015
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Year of Publication 29.12.2015
Patent
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METHOD AND SYSTEM FOR MULTI-PATTERNING LAYOUT DECOMPOSITION
HSU CHINANG, HSU CHIN-HSIUNG, HOU YUAN-TE, YANG WEN-JU, HO GODINA, CHEN WEN-HAO
Year of Publication 02.04.2015
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Year of Publication 02.04.2015
Patent
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Multi-patterning lithography aware cell placement in integrated circuit design
ALPERT CHARLES JAY, VISWANATHAN NATARAJAN, LI ZHUO, AGARWAL KANAK BEHARI, NAM GI-JOON
Year of Publication 23.07.2013
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Year of Publication 23.07.2013
Patent
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MULTI-PATTERNING LITHOGRAPHY AWARE CELL PLACEMENT IN INTEGRATED CIRCUIT DESIGN
ALPERT CHARLES JAY, VISWANATHAN NATARAJAN, LI ZHUO, AGARWAL KANAK BEHARI, NAM GI-JOON
Year of Publication 04.04.2013
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Year of Publication 04.04.2013
Patent
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First roughness measurement of SOG/SOC core pattern in depth direction with novel 3D roughness measurement techniques
Shigaki, Shuhei, Kosai, Jun, Furukawa, Yuki, Hattori, Hayato, Shibayama, Wataru, Kawada, Hiroki, Iwaki, Tomohiro
Published in Proceedings of SPIE, the international society for optical engineering (23.04.2025)
Published in Proceedings of SPIE, the international society for optical engineering (23.04.2025)
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Conference Proceeding