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Microchannel Pressure Measurements Using Molecular Sensors
Chihyung Huang, Gregory, J.W., Sullivan, J.P.
Published in Journal of microelectromechanical systems (01.08.2007)
Published in Journal of microelectromechanical systems (01.08.2007)
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Journal Article
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Method of manufacture for microelectromechanical devices
TUNG MING-HAU, BATEY JOHN, GALLY BRIAN JAMES, CHUI CLARENCE, KOTHARI MANISH
Year of Publication 27.04.2010
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Year of Publication 27.04.2010
Patent
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METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES
TUNG MING-HAU, BATEY JOHN, GALLY BRIAN JAMES, CHUI CLARENCE, KOTHARI MANISH
Year of Publication 12.03.2009
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Year of Publication 12.03.2009
Patent
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Method of manufacture for microelectromechanical devices
TUNG MING-HAU, BATEY JOHN, GALLY BRIAN JAMES, CHUI CLARENCE, KOTHARI MANISH
Year of Publication 13.01.2009
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Year of Publication 13.01.2009
Patent
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Method of manufacture for microelectromechanical devices
GALLY, BRIAN JAMES, CHUI, CLARENCE, KOTHARI, MANISH, TUNG, MING-HAU, BATEY, JOHN
Year of Publication 01.09.2007
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Year of Publication 01.09.2007
Patent
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Method of manufacture for microelectromechanical devices
TUNG MING-HAU, BATEY JOHN, GALLY BRIAN JAMES, CHUI CLARENCE, KOTHARI MANISH
Year of Publication 10.11.2005
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Year of Publication 10.11.2005
Patent
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REDUCTION OF ETCHING CHARGE DAMAGE IN MANUFACTURE OF MICROELECTROMECHANICAL DEVICES
BATEY JOHN, GALLY BRIAN JAMES, CHUI CLARENCE, KOTHARI MANISH, TUNG MING HAU
Year of Publication 09.01.2007
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Year of Publication 09.01.2007
Patent
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Development of a multi-level repulsive force out-of-plane micro electrostatic actuator
He, S., Ben Mrad, R.
Published in 2009 35th Annual Conference of IEEE Industrial Electronics (01.11.2009)
Published in 2009 35th Annual Conference of IEEE Industrial Electronics (01.11.2009)
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Conference Proceeding
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REDUCTION OF ETCHING CHARGE DAMAGE IN MANUFACTURE OF MICROELECTROMECHANICAL DEVICES
CHUI, CLARENCE, KOTHARI, MANISH, TUNG, MING-HAU, BATEY, JOHN, GALLY, BRIAN, JAMES
Year of Publication 24.11.2005
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Year of Publication 24.11.2005
Patent