Search Results - "etching kinetics" :: K.UTB vyhledávací portál

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On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO2 and SixNy) in Multi-Component Fluorocarbon Gas Mixtures

by Efremov, Alexander, Lee, Byung Jun, Kwon, Kwang-Ho
Published in Materials (15.03.2021)

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by Choi, Gilyoung, Efremov, Alexander, Lee, Dae-Kug, Cho, Choong-Ho, Kwon, Kwang-Ho
Published in Vacuum (01.10.2023)

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by Sun, Shih-Po, Wei, Mei, Olson, James R, Shaw, Montgomery T
Published in ACS applied materials & interfaces (29.07.2009)

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