A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen
Lander, R., Hooker, J., van Zijl, J., Roozeboom, F., Maas, M., de Tamminga, Y., Wolters, R.
Published in 32nd European Solid-State Device Research Conference (2002)
Published in 32nd European Solid-State Device Research Conference (2002)
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