Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD
Veltkamp, Henk-Willem, Janssens, Yves L., de Boer, Meint J., Zhao, Yiyuan, Wiegerink, Remco J., Tas, Niels R., Lötters, Joost C.
Published in Micromachines (Basel) (01.11.2022)
Published in Micromachines (Basel) (01.11.2022)
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Journal Article
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography
Ni, Shu, Berenschot, Erwin J. W., Westerik, Pieter J., de Boer, Meint J., Wolf, René, Le-The, Hai, Gardeniers, Han J. G. E., Tas, Niels R.
Published in Microsystems & nanoengineering (23.03.2020)
Published in Microsystems & nanoengineering (23.03.2020)
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Journal Article
Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology
Zhao, Yiyuan, Veltkamp, Henk-Willem, Schut, Thomas V. P., Sanders, Remco G. P., Breazu, Bogdan, Groenesteijn, Jarno, de Boer, Meint J., Wiegerink, Remco J., Lötters, Joost C.
Published in Micromachines (Basel) (31.05.2020)
Published in Micromachines (Basel) (31.05.2020)
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Journal Article
Deep reactive ion etching of cylindrical nanopores in silicon for photonic crystals
Goodwin, Melissa J, Harteveld, Cornelis A M, de Boer, Meint J, Vos, Willem L
Published in Nanotechnology (28.05.2023)
Published in Nanotechnology (28.05.2023)
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Journal Article
Integrated Lithographic Molding for Microneedle-Based Devices
Luttge, R., Berenschot, E.J.W., de Boer, M.J., Altpeter, D.M., Vrouwe, E.X., van den Berg, A., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.08.2007)
Published in Journal of microelectromechanical systems (01.08.2007)
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Journal Article
Stochastic Resonance in a Voltage-Controlled Micromechanical Slider
Droogendijk, Harmen, de Boer, Meint J., Sanders, Remco G. P., Krijnen, Gijs J. M.
Published in Journal of microelectromechanical systems (01.06.2015)
Published in Journal of microelectromechanical systems (01.06.2015)
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Journal Article
Nanoimprint Lithography for Nanophotonics in Silicon
Bruinink, Christiaan M, Burresi, Matteo, de Boer, Meint J, Segerink, Frans B, Jansen, Henri V, Berenschot, E, Reinhoudt, David N, Huskens, Jurriaan, Kuipers, L
Published in Nano letters (01.09.2008)
Published in Nano letters (01.09.2008)
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Journal Article
Silicon micromachined hollow microneedles for transdermal liquid transport
Gardeniers, H.J.G.E., Luttge, R., Berenschot, E.J.W., de Boer, M.J., Yeshurun, S.Y., Hefetz, M., van't Oever, R., van den Berg, A.
Published in Journal of microelectromechanical systems (01.12.2003)
Published in Journal of microelectromechanical systems (01.12.2003)
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Journal Article
Micromachining of buried micro channels in silicon
de Boer, M.J., Tjerkstra, R.W., Berenschot, J.W., Jansen, H.V., Burger, G.J., Gardeniers, J.G.E., Elwenspoek, M., van den Berg, A.
Published in Journal of microelectromechanical systems (01.03.2000)
Published in Journal of microelectromechanical systems (01.03.2000)
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Journal Article
Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback Control
Dijkstra, Marcel, Lammerink, Theo S. J., de Boer, Meint J., Berenschot, Erwin J. W., Wiegerink, Remco J., Elwenspoek, Miko
Published in Journal of microelectromechanical systems (01.08.2014)
Published in Journal of microelectromechanical systems (01.08.2014)
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Journal Article
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
de Boer, M.J., Gardeniers, J.G.E., Jansen, H.V., Smulders, E., Gilde, M.-J., Roelofs, G., Sasserath, J.N., Elwenspoek, M.
Published in Journal of microelectromechanical systems (01.08.2002)
Published in Journal of microelectromechanical systems (01.08.2002)
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Journal Article
Micromechanically tuned ring resonator in silicon on insulator
Kauppinen, Lasse J, Abdulla, Shahina M C, Dijkstra, Meindert, de Boer, Meint J, Berenschot, Erwin, Krijnen, Gijs J M, Pollnau, Markus, de Ridder, René M
Published in Optics letters (01.04.2011)
Published in Optics letters (01.04.2011)
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Journal Article
High Power Si Sidewall Heaters for Fluidic Applications Fabricated by Trench-Assisted Surface Channel Technology
Veltkamp, Henk-Willem, Zhao, Yiyuan, de Boer, Meint J., Sanders, Remco G.P., Wiegerink, Remco J., Lotters, Joost C.
Published in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2019)
Published in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2019)
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Conference Proceeding
Microfabrication of palladium-silver alloy membranes for hydrogen separation
Hien Duy Tong, Berenschot, J.W.E., De Boer, M.J., Gardeniers, J.G.E., Wensink, H., Jansen, H.V., Nijdam, W., Elwenspoek, M.C., Gielens, F.C., van Rijn, C.J.M.
Published in Journal of microelectromechanical systems (01.10.2003)
Published in Journal of microelectromechanical systems (01.10.2003)
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Journal Article
Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation
Hien Duy Tong, Gielens, F.C., Gardeniers, J.G.E., Jansen, H.V., Berenschot, J.W., de Boer, M.J., de Boer, J.H., van Rijn, C.J.M., Elwenspoek, M.C.
Published in Journal of microelectromechanical systems (01.02.2005)
Published in Journal of microelectromechanical systems (01.02.2005)
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Journal Article
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Rusu, C., van't Oever, R., de Boer, M.J., Jansen, H.V., Berenschot, J.W., Bennink, M.L., Kanger, J.S., de Grooth, B.G., Elwenspoek, M., Greve, J., Brugger, J., van den Berg, A.
Published in Journal of microelectromechanical systems (01.06.2001)
Published in Journal of microelectromechanical systems (01.06.2001)
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Journal Article