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RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR
SHIMIZU HIROAKI, UTSUMI YOSHIYUKI, NAKAMURA TSUYOSHI, SESHIMO TAKEHIRO, HADA HIDEO, KAWAUE AKIYA
Year of Publication 13.05.2010
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Year of Publication 13.05.2010
Patent
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Resist composition, method of forming resist pattern, novel compound, and acid generator
SHIMIZU HIROAKI, UTSUMI YOSHIYUKI, NAKAMURA TSUYOSHI, SESHIMO TAKEHIRO, HADA HIDEO, KAWAUE AKIYA
Year of Publication 23.03.2010
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Year of Publication 23.03.2010
Patent
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