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MICROWAVE APPARATUS FOR GENERATING PLASMA AFTERGLOWS FOR STRIPPING SEMICONDUCTOR
HOFF, ANDREW M, SPENCER, JOHN E, BOREL, RICHARD A, LINXWILER, KENNETH E
Year of Publication 29.05.1990
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Year of Publication 29.05.1990
Patent
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Microwave apparatus for generating plasma afterglows
HOFF; ANDREW M, LINXWILER; KENNETH E, BOREL; RICHARD A, SPENCER; JOHN E
Year of Publication 16.06.1987
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Year of Publication 16.06.1987
Patent
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