Consideration of the effect of nanoscale porosity on mass transport phenomena in PECVD coatings
Franke, J, Zysk, F, Wilski, S, Liedke, M O, Butterling, M, Attallah, A G, Wagner, A, Kühne, T D, Dahlmann, R
Published in Journal of physics. D, Applied physics (11.10.2024)
Published in Journal of physics. D, Applied physics (11.10.2024)
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