Kinetics of copper drift in low-κ polymer interlevel dielectrics
Loke, A.L.S., Wetzel, J.T., Townsend, P.H., Tanabe, T., Vrtis, R.N., Zussman, M.P., Kumar, D., Ryu, C., Wong, S.S.
Published in IEEE transactions on electron devices (01.11.1999)
Published in IEEE transactions on electron devices (01.11.1999)
Get full text
Journal Article
Kinetics of copper drift in low-/spl kappa/ polymer interlevel dielectrics
Loke, A.L.S., Wetzel, J.T., Townsend, P.H., Tanabe, T., Vrtis, R.N., Zussman, M.P., Kumar, D., Ryu, C., Wong, S.S.
Published in IEEE transactions on electron devices (01.11.1999)
Published in IEEE transactions on electron devices (01.11.1999)
Get full text
Journal Article